Simultaneous pattern-scan placement during sample processing
US-2024207969-A1 · Jun 27, 2024 · US
US9186751B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9186751-B2 |
| Application number | US-201213529793-A |
| Country | US |
| Kind code | B2 |
| Filing date | Jun 21, 2012 |
| Priority date | Jun 22, 2011 |
| Publication date | Nov 17, 2015 |
| Grant date | Nov 17, 2015 |
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A laser irradiation apparatus of the embodiment includes: a laser light transmission mechanism to guide laser light from a laser light source and emit the laser light from a laser light emission part; a condensing mechanism to condense the laser light; a pipe state casing to house and hold the condensing mechanism inside thereof and have an opening part to irradiate the laser light; a fluid supply mechanism to supply a fluid into the casing to emit the fluid from the opening part; a positioning mechanism provided at the casing to keep a distance from the condensing mechanism to the processing object constant by being brought into contact with the processing object; and a fluid guide mechanism to guide the fluid emitted from the opening part to flow between the casing and the processing object along an axial direction of the casing.
Opening claim text (preview).
What is claimed is: 1. A laser peening apparatus, comprising: a laser light transmission mechanism configured to guide laser light from a laser light source to emit the laser light from a laser light emission part; a condensing mechanism configured to condense the laser light emitted from the laser light emission part; a pipe shaped casing configured to house and hold the condensing mechanism inside thereof and have an opening part to irradiate the laser light condensed by the condensing mechanism to a processing object; a fluid supply mechanism configured to supply a liquid fluid from a fluid supply source into the casing to emit the liquid fluid from the opening part; a positioning mechanism provided at the casing to keep a distance from the condensing mechanism to the processing object constant by being brought into contact with the processing object; and a fluid guide mechanism configured to guide the liquid fluid emitted from the opening part to generate a flow of the liquid fluid along an axial direction of the casing between an outer surface of the casing and the processing object so as to create attraction therebetween. 2. The laser peening apparatus according to claim 1 , wherein the fluid guide mechanism comprises a groove provided on the outer surface of the casing or plural weirs provided on the casing with an interval to be in parallel. 3. The laser peening apparatus according to claim 1 , further comprising an emission nozzle to emit the liquid fluid supplied by the fluid supply source at an opposite side from the opening part of the casing. 4. The laser peening apparatus according to claim 1 , wherein a position of the laser light emission part with respect to the condensing mechanism is made changeable in the laser light transmission mechanism. 5. The laser peening apparatus according to claim 1 , wherein the fluid supply mechanism is configured to supply the liquid fluid through a tubular body capable of being bent. 6. The laser peening apparatus according to claim 1 , wherein the fluid supply mechanism comprises: a first annular member configured to pass the liquid fluid through inside; a second annular member configured to pass the liquid fluid through inside; and a connection mechanism to connect the first annular member and the second annular member. 7. The laser peening apparatus according to claim 1 , further comprising: a mechanism provided in front of the laser light transmission mechanism to monitor reflected light transmitted via the laser light transmission mechanism. 8. A laser peening method, comprising: preparing a laser irradiation apparatus including: a laser light transmission mechanism configured to guide laser light from a laser light source to emit the laser light from a laser light emission part; a condensing mechanism configured to condense the laser light emitted from the laser light emission part; a pipe shaped casing configured to house and hold the condensing mechanism inside thereof and have an opening part to irradiate the laser light condensed by the condensing mechanism to a processing object; a fluid supply mechanism configured to supply a liquid fluid from a fluid supply source into the casing to emit the liquid fluid from the opening part; a positioning mechanism provided at the casing to keep a distance from the condensing mechanism to the processing object constant by being brought into contact with the processing object; and a fluid guide mechanism configured to guide the liquid fluid emitted from the opening part to flow between an outer surface of the casing and the processing object along an axial direction of the casing; emitting the liquid fluid supplied from the fluid supply mechanism through the opening part of the casing so as to generate a flow of the liquid fluid along the fluid guide mechanism to create attraction between the outer surface of the casing and the processing object; and irradiating the laser light to the processing object under a state of forming the flow of the liquid fluid. 9. A laser irradiation apparatus, comprising: a laser light transmission mechanism configured to guide laser light from a laser light source to emit the laser light from a laser light emission part; a condensing mechanism configured to condense the laser light emitted from the laser light emission part; a pipe shaped casing configured to house and hold the condensing mechanism inside thereof and have an opening part to irradiate the laser light condensed by the condensing mechanism to a processing object; a fluid supply mechanism configured to supply a fluid from a fluid supply source into the casing to emit the fluid from the opening part; a positioning mechanism provided at the casing to keep a distance from the condensing mechanism to the processing object constant by being brought into contact with the processing object; a fluid guide mechanism configured to guide the fluid emitted from the opening part to flow between the casing and the processing object along an axial direction of the casing; and an emission nozzle disposed on the casing at an opposite side from the opening part thereof to emit the fluid supplied by the fluid supply source.
Features inside the nozzle for feeding the fluid stream through the nozzle · CPC title
inside the workpiece · CPC title
in an atmosphere of gases chemically reacting with the workpiece · CPC title
in an atmosphere of particular gases · CPC title
the fluid stream containing a liquid · CPC title
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