Sensing circuit of a micro-electromechanical sensor
US-2024345125-A1 · Oct 17, 2024 · US
MEMS devices, interface circuits, and methods of making thereof
US9179221B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9179221-B2 |
| Application number | US-201414255703-A |
| Country | US |
| Kind code | B2 |
| Filing date | Apr 17, 2014 |
| Priority date | Jul 18, 2013 |
| Publication date | Nov 3, 2015 |
| Grant date | Nov 3, 2015 |
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Abstract
Official abstract text for this publication.
A micro-electro-mechanical system (MEMS) device includes a first plate, a second plate disposed over the first plate, and a first moveable plate disposed between the first plate and the second plate. The MEMS device further includes a second moveable plate disposed between the first moveable plate and the second plate.
First claim
Opening claim text (preview).
What is claimed is: 1. A micro-electro-mechanical system (MEMS) device comprising: a first plate; a second plate disposed over the first plate; a first moveable plate disposed between the first plate and the second plate; and a second moveable plate disposed between the first moveable plate and the second plate, wherein the MEMS device comprises a first input/output node coupled to the first plate, a second input/output node coupled to the second plate, a third input/output…
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Classifications
- H04R19/04Primary
Electricity · mapped topic
Operations & Transport · mapped topic
Electricity · mapped topic
- B81B3/0086Primary
Operations & Transport · mapped topic
Operations & Transport · mapped topic
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Frequently asked questions
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- What does patent US9179221B2 cover?
- A micro-electro-mechanical system (MEMS) device includes a first plate, a second plate disposed over the first plate, and a first moveable plate disposed between the first plate and the second plate. The MEMS device further includes a second moveable plate disposed between the first moveable plate and the second plate.
- Who is the assignee on this patent?
- Infineon Technologies Ag
- What technology area does this patent fall under?
- Primary CPC classification H04R19/04. Mapped technology areas include Electricity.
- When was this patent published?
- Publication date Tue Nov 03 2015 00:00:00 GMT+0000 (Coordinated Universal Time) (B2). Legal status and post-grant events are not shown on this page.
- What related patents are in patentsdb?
- We list 8 related publications on this page (citations in our corpus or others sharing the same primary CPC).