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US-9531048-B2 · Dec 27, 2016 · US
Isotropically-etched cavities for evanescent-mode electromagnetic-wave cavity resonators
US9178256B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9178256-B2 |
| Application number | US-201213451385-A |
| Country | US |
| Kind code | B2 |
| Filing date | Apr 19, 2012 |
| Priority date | Apr 19, 2012 |
| Publication date | Nov 3, 2015 |
| Grant date | Nov 3, 2015 |
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Abstract
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This disclosure provides implementations of electromechanical systems (EMS) resonator structures, devices, apparatus, systems, and related processes. In one aspect, a device includes an evanescent-mode electromagnetic-wave cavity resonator. In some implementations, the resonator includes an isotropically-etched cavity operable to support one or more evanescent electromagnetic wave modes. In some implementations, the resonator also includes a cavity ceiling arranged to form a volume in conjunction with the isotropically-etched cavity. In some implementations, the resonator also includes a capacitive tuning structure having a portion that is located at least partially within the volume so as to support the evanescent electromagnetic wave modes. In some implementations, a distal surface of the tuning structure is separated from the closest surface to it by a gap distance, a resonant electromagnetic wave mode of the cavity resonator being dependent at least partially on the gap distance.
First claim
Opening claim text (preview).
What is claimed is: 1. A device comprising: an evanescent-mode electromagnetic-wave cavity resonator including: a first dielectric cavity portion including a cavity operable to support at least one evanescent electromagnetic wave mode, the first cavity portion including an inner cavity surface defining the cavity; a first conductive layer on the inner cavity surface; a second cavity portion adjacent the first cavity portion, the second cavity portion including a cavity ceilin…
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Electricity · mapped topic
Electricity · mapped topic
Electricity · mapped topic
- H01P1/208Primary
Electricity · mapped topic
Electricity · mapped topic
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Frequently asked questions
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- What does patent US9178256B2 cover?
- This disclosure provides implementations of electromechanical systems (EMS) resonator structures, devices, apparatus, systems, and related processes. In one aspect, a device includes an evanescent-mode electromagnetic-wave cavity resonator. In some implementations, the resonator includes an isotropically-etched cavity operable to support one or more evanescent electromagnetic wave modes. In som…
- Who is the assignee on this patent?
- Stephanou Philip Jason, Park Sang-June, Shenoy Ravindra V, and 1 more
- What technology area does this patent fall under?
- Primary CPC classification H01P1/208. Mapped technology areas include Electricity.
- When was this patent published?
- Publication date Tue Nov 03 2015 00:00:00 GMT+0000 (Coordinated Universal Time) (B2). Legal status and post-grant events are not shown on this page.
- What related patents are in patentsdb?
- We list 8 related publications on this page (citations in our corpus or others sharing the same primary CPC).