Annular cooling fluid passage for magnets

Patent metadata

Field	Value
Publication number	US-9177708-B2
Application number	US-201313966611-A
Country	US
Kind code	B2
Filing date	Aug 14, 2013
Priority date	Jun 14, 2013
Publication date	Nov 3, 2015
Grant date	Nov 3, 2015

Abstract

A magnet having an annular coolant fluid passage is generally described. Various examples provide a magnet including a first magnet and a second magnet disposed around an ion beam coupler with an aperture there through. Each of the first and second magnets including a metal core having a cavity therein, one or more conductive wire wraps disposed around the metal core, and an annular core element configured to be inserted into the cavity, wherein an annular coolant fluid passage is formed between the cavity and the annular core element. Furthermore, each annular core element may have a first diameter and a middle section having a second diameter, the second diameter being less than the first diameter. Other embodiments are disclosed and claimed.

First claim

The invention claimed is:

1. A magnet comprising:
a metal core having a cavity therein;
a plurality of conductive wire wraps disposed around the metal core to shape an ion beam produced by an ion source of an ion implant apparatus; and
an annular core element configured to be received within the cavity, the annular core element configured to form an annular coolant fluid passage between the cavity and the annular core element, wherein the annular core element has an external coolant fluid opening, an internal coolant fluid opening disposed in a middle section, and an internal coolant fluid passage connecting the external coolant fluid opening and the internal coolant fluid opening, and wherein the external coolant fluid opening is a first external coolant fluid opening and the internal coolant fluid opening is a first internal coolant fluid opening, and the annular core has a second external coolant fluid opening, a second internal coolant fluid opening disposed in the middle section, and a second internal coolant fluid passage connecting the second external coolant fluid opening and the second internal coolant fluid opening.

2. The magnet according to claim 1 , wherein the annular core element has a first diameter and a middle section having a second diameter, the second diameter being less than the first diameter.

3. The magnet according to claim 1 , wherein the annular core element includes a circumferential recess for receiving an o-ring.

4. The magnet according to claim 3 , further comprising an o-ring disposed in the circumferential recess, the o-ring for fluidically sealing the annular core element to the metal core.

5. The magnet according to claim 4 , further comprising an end cap for securing the annular core element to the metal core.

6. A magnet for use with an ion implant apparatus, the magnet comprising:
an ion beam coupling having an aperture disposed there through;
a first magnet disposed adjacent to the ion beam coupling; and
a second magnet disposed adjacent to the ion beam coupling and the first magnet, each of the first and second magnets including:
a metal core having a cavity therein;
a plurality of conductive wire wraps disposed around the metal core; and
an annular core element configured to be received within the cavity, the annular core element configured to form an annular coolant fluid passage between the metal core and the annular core element, wherein the annular core element has a first diameter and a middle section having a second diameter, the second diameter being less than the first diameter, wherein the annular core element has an external coolant fluid opening, an internal coolant fluid opening disposed in the middle section, and an internal coolant fluid passage connecting the external coolant fluid opening and the internal coolant fluid opening, and wherein the external coolant fluid opening is a first external coolant fluid opening and the internal coolant fluid opening is a first internal coolant fluid opening, and the annular core has a second external coolant fluid opening, a second internal coolant fluid opening disposed in the middle section, and a second internal coolant fluid passage connecting the second external coolant fluid opening and the second internal coolant fluid opening.

7. The magnet according to claim 6 , wherein the magnet is a quadrupole magnet.

8. The magnet according to claim 6 , further comprising a housing disposed around the first and second magnets.

9. The magnet according to claim 6 , wherein the annular core element includes at least one circumferential recess for receiving an o-ring.

10. The magnet according to claim 9 , further comprising an o-ring disposed in the circumferential recess.

11. The magnet according to claim 10 , further comprising an end cap configured to secure the annular core element to the metal core.

Assignees

• Varian Semiconductor Equipment

Inventors

• Barraclough Scott
• Buff James S

Classifications

• H01F7/20 Primary

  without armatures (cores H01F3/00; coils H01F5/00 {; shaping metal by applying magnetic forces B21D26/14; electromagnets specially adapted for NMR applications G01R33/381}) · CPC title

• H01F27/10

  Liquid cooling · CPC title

• H01J2237/002

  Cooling arrangements · CPC title

• H01J2237/1526

  For X-Y scanning · CPC title

• H01J37/3171

  for ion implantation · CPC title