Grating coupler for inter-chip optical coupling

Patent metadata

Field	Value
Publication number	US-9176291-B2
Application number	US-201213588242-A
Country	US
Kind code	B2
Filing date	Aug 17, 2012
Priority date	Aug 17, 2012
Publication date	Nov 3, 2015
Grant date	Nov 3, 2015

Abstract

A photonic integrated circuit (PIC) that includes an optical source that provides an optical signal having a wavelength is described. This optical source includes a reflecting layer, a bottom cladding layer, an active layer (such as a III-V semiconductor) having a bandgap wavelength that exceeds that of silicon, and a top cladding layer. Moreover, an optical coupler (such as a grating coupler) that couples the optical signal out of a plane of the active layer is included in a region of the active layer. In this region, the top cladding layer is absent. Furthermore, in an adjacent region, the top cladding layer includes an inverse taper so that the top cladding layer is tapered down from a width distal from the region. In conjunction with the optical coupler, the inverse taper may facilitate low-loss optical coupling of the optical signal between the PIC and another PIC.

First claim

What is claimed is:

1. A photonic integrated circuit (PIC), comprising:
a substrate;
a bottom cladding layer disposed on the substrate;
an active layer, disposed on the bottom cladding layer, having a bandgap wavelength that exceeds that of silicon;
a top cladding layer disposed on the active layer, wherein the bottom cladding layer, the active layer and the top cladding layer constitute an optical source that provides an optical signal having a wavelength; and
an optical coupler, disposed in a first region of the active layer, configured to couple the optical signal out of a plane of the active layer;
wherein the top cladding layer is absent above the optical coupler in the first region; and
wherein, in a second region proximate to the first region, the top cladding layer includes an inverse taper so that a width of the top cladding layer is tapered down from a width in a third region distal from the first region.

2. The PIC of claim 1 , wherein the optical coupler includes a diffraction grating.

3. The PIC of claim 2 , wherein a diffraction order of the diffraction grating greater than 1 couples the optical signal out of the plane of the active layer.

4. The PIC of claim 2 , wherein the diffraction grating has a length less than 75 μm.

5. The PIC of claim 2 , wherein the diffraction grating is at an angle relative to a plane of the active layer; and
wherein the angle is other than 0 or 90°.

6. The PIC of claim 1 , wherein the active layer includes one of: quantum wells, indium gallium arsenide phosphide and aluminum gallium arsenide phosphide.

7. The PIC of claim 1 , wherein the substrate includes an undoped III-V semiconductor;
wherein the bottom cladding layer includes a first type of doped III-V semiconductor; and
wherein the top cladding layer includes a second type of doped III-V semiconductor.

8. The PIC of claim 1 , wherein absorption of the active layer at the wavelength is reduced in the first region and the second region relative to the third region.

9. The PIC of claim 1 , wherein the PIC further includes a reflecting layer between the substrate and the bottom cladding layer.

10. The PIC of claim 9 , wherein the reflecting layer includes a distributed Bragg reflector.

11. The PIC of claim 9 , wherein the reflecting layer is a metal mirror deposited at an etched pit from a back surface of the substrate.

12. The PIC of claim 9 , wherein the reflector layer is below the optical coupler, and the layers and thickness between the optical coupler and the reflector layer ensure the coherence of reflected waves.

13. The PIC of claim 1 , wherein ions are implanted in the top cladding layer to reduce free-carrier absorption.

14. The PIC of claim 1 , wherein the PIC further includes a material covering a top surface of the top cladding layer in the second region and the third region, and covering a top surface of the active layer in the first region and the second region.

15. A system, comprising:
a first PIC, wherein the first PIC includes:
a substrate;
a bottom cladding layer disposed on the substrate;
an active layer, disposed on the bottom cladding layer, having a bandgap wavelength that exceeds that of silicon;
a top cladding layer disposed on the active layer; and
an optical coupler, disposed in a first region of the active layer, configured to couple an optical signal out of a plane of the active layer;
wherein the top cladding layer is absent above the optical coupler in the first region; and
wherein, in a second region proximate to the first region, the top cladding layer includes an inverse taper so that a width of the top cladding layer is tapered down from a width in a third region distal from the first region; and

a second PIC facing the first PIC, wherein the second PIC includes a semiconductor layer; and
wherein the semiconductor layer includes an optical waveguide that includes another optical coupler configured to receive the optical signal from the optical coupler in the first PIC.

16. The system of claim 15 , wherein the semiconductor layer further includes a phase-tuning mechanism configured to adjust a phase of the optical signal.

17. The system of claim 15 , wherein the first PIC further includes a reflector at an edge of the third region;
wherein the semiconductor layer includes another reflector; and
wherein the active layer in the first PIC and the optical waveguide in the second PIC between the reflector and the other reflector define an optical cavity.

18. The system of claim 17 , wherein the first PIC and the second PIC provide a hybrid optical source.

19. The system of claim 15 , wherein the semiconductor layer includes silicon.

Assignees

• Li Guoliang
• Luo Ying L
• Zheng Xuezhe
• Cunningham John E
• Krishnamoorthy Ashok V
• Oracle Int Corp

Inventors

• Li Guoliang
• Luo Ying L
• Zheng Xuezhe
• Cunningham John E
• Krishnamoorthy Ashok V

Classifications

• H01S5/1014

  Tapered waveguide, e.g. spotsize converter (H01S5/1064 takes precedence) · CPC title

• H01S5/187

  using Bragg reflection · CPC title

• H01S5/14

  External cavity lasers (H01S5/18 takes precedence; mode locking H01S5/065) · CPC title

• G02B6/1228

  Tapered waveguides, e.g. integrated spot-size transformers (for coupling with fibres G02B6/305) · CPC title

• G02B2006/12188

  Ion implantation · CPC title