Trimming of dummy fill shapes holes to affect near-neighbor dummy fill shapes with built-in optical proximity corrections for semiconductor applications

Patent metadata

Field	Value
Publication number	US-9170482-B2
Application number	US-201414231913-A
Country	US
Kind code	B2
Filing date	Apr 1, 2014
Priority date	Jan 18, 2012
Publication date	Oct 27, 2015
Grant date	Oct 27, 2015

Abstract

Near-neighbor trimming of dummy fill shapes with built-in optical proximity corrections (OPCs) for semiconductor applications is provided. A method for the near-neighbor trimming includes adding one or more hole shapes onto a semiconductor design layout comprising a plurality of design shapes. The method further includes trimming adjacent ones of the plurality of which are covered by the one or more hole shapes.

First claim

What is claimed:

1. A computer program product comprising a computer usable storage medium having readable program code embodied in the storage medium, the computer program product includes at least one component operable to:
place at least one set of design shapes in a first region of a semiconductor design or test layout;
place a plurality of sets of design shapes in a second region of the semiconductor design or test layout, the plurality of sets of design shapes being one of…

Assignees

• IBM
• Globalfoundries Us 2 Llc

Inventors

• Landis Howard S

Classifications

• G06F30/39

  Physics · mapped topic

• G03F1/36 Primary

  Physics · mapped topic

• G03F7/705

  Physics · mapped topic

• G03F1/44

  Physics · mapped topic

• G03F7/70441

  Physics · mapped topic