Apparatus for nano structure fabrication

US9168680B2 · US · B2

Patent metadata
FieldValue
Publication numberUS-9168680-B2
Application numberUS-201213559640-A
CountryUS
Kind codeB2
Filing dateJul 27, 2012
Priority dateMay 19, 2009
Publication dateOct 27, 2015
Grant dateOct 27, 2015

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  2. Abstract

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Abstract

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One or more techniques for nano structure fabrication are provided. In an embodiment, an apparatus for manufacturing a nano structure is disclosed. The apparatus includes a stamp having a line pattern on a surface thereof that comprises a plurality of protrusions, a die configured to hold a substrate thereon, and a mechanical processing unit configured to press the plurality of protrusions of the stamp against the substrate with a predetermined pressure so as to form at least one channel pore therebetween.

First claim

Opening claim text (preview).

The invention claimed is: 1. An apparatus for manufacturing a nano structure, comprising: a stamp including a line pattern comprising a plurality of protrusions; a die configured to hold a substrate thereon having a surface; an etchant solution; a mechanical processing unit configured to: place the plurality of protrusions of the stamp in contact with the surface of the substrate so that a plurality of open channel pores are formed therebetween; and position an assembly o…

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What does patent US9168680B2 cover?
One or more techniques for nano structure fabrication are provided. In an embodiment, an apparatus for manufacturing a nano structure is disclosed. The apparatus includes a stamp having a line pattern on a surface thereof that comprises a plurality of protrusions, a die configured to hold a substrate thereon, and a mechanical processing unit configured to press the plurality of protrusions of t…
Who is the assignee on this patent?
Lee Kwangyeol, Univ Korea Res & Bus Found
What technology area does this patent fall under?
Primary CPC classification B29C33/3857. Mapped technology areas include Operations & Transport.
When was this patent published?
Publication date Tue Oct 27 2015 00:00:00 GMT+0000 (Coordinated Universal Time) (B2). Legal status and post-grant events are not shown on this page.
What related patents are in patentsdb?
We list 8 related publications on this page (citations in our corpus or others sharing the same primary CPC).