Ultra-compact photodetector on an optical waveguide

Patent metadata

Field	Value
Publication number	US-9164231-B2
Application number	US-201113205484-A
Country	US
Kind code	B2
Filing date	Aug 8, 2011
Priority date	Aug 8, 2011
Publication date	Oct 20, 2015
Grant date	Oct 20, 2015

Abstract

An integrated circuit is described. This integrated circuit includes an optical waveguide defined in a semiconductor layer, and an optical detector disposed on top of the optical waveguide. Moreover, the optical waveguide has an end with a reflecting facet. For example, the reflective facet may be defined using an anisotropic etch of the semiconductor layer. This reflecting facet reflects light propagating in a plane of the optical waveguide out of the plane into the optical detector, thereby providing a photodetector with high optical responsivity, including an extremely low dark current (and, thus, high photosensitivity) and an extremely small capacitance (and, thus, high electrical bandwidth).

First claim

What is claimed is:

1. An integrated circuit, comprising:
an optical waveguide defined in a semiconductor layer, wherein the optical waveguide defines an optical waveguide propagation axis, wherein the optical waveguide has an end with a reflecting facet, and wherein the reflecting facet has an angle of approximately 54.74° with respect to the optical waveguide propagation axis; and
an optical detector disposed on top of the optical waveguide, wherein a bottom surface of the optical detector is in direct physical contact with a top surface of the optical waveguide, wherein the reflecting facet is configured to reflect light from the optical waveguide into the optical detector, wherein refractive indices of the optical waveguide and the optical detector are approximately equal, thereby causing light propagating in the optical waveguide along the optical waveguide propagation axis to be reflected by the reflecting facet so that the reflected light enters and propagates in the optical detector at an angle of approximately 70.52° with respect to the bottom surface of the optical detector;
wherein the optical waveguide has a thickness between 0.25 μm and 3 μm measured along a first direction that is normal to the top surface of the optical waveguide, wherein the optical waveguide has a width between 0.5 μm and 3 μm measured along a second direction that is parallel to the top surface of the optical waveguide and perpendicular to the optical waveguide propagation axis, wherein the optical detector has a thickness between 0.5 μm and 3.5 μm measured along the first direction, wherein the optical detector has a width between 2 μm and 5 μm measured along the second direction, and wherein the optical detector has a length between 3 μm and 6 μm measured along the optical propagation axis.

2. The integrated circuit of claim 1 , wherein the semiconductor layer includes silicon.

3. The integrated circuit of claim 1 , wherein the reflective facet is defined using an anisotropic etch of the semiconductor layer.

4. The integrated circuit of claim 1 , wherein the optical detector includes germanium.

5. The integrated circuit of claim 1 , wherein the optical detector includes one of a PIN photodetector and an avalanche photodetector.

6. The integrated circuit of claim 1 , further comprising:
a substrate; and
a buried-oxide layer disposed on the substrate, wherein the semiconductor layer is disposed on the buried-oxide layer.

7. The integrated circuit of claim 6 , wherein the substrate includes a semiconductor.

8. The integrated circuit of claim 6 , wherein the substrate, the buried-oxide layer and the semiconductor layer comprise a silicon-on-insulator technology.

9. The integrated circuit of claim 1 , wherein the optical detector is configured to absorb the light in one pass through the optical detector.

10. The integrated circuit of claim 1 , wherein the optical detector is configured to absorb the light in multiple passes through the optical detector.

11. A system, comprising:
a processor;
a memory; and
an integrated circuit associated with at least one of the processor and the memory, wherein the integrated circuit includes,
an optical waveguide defined in a semiconductor layer, wherein the optical waveguide defines an optical waveguide propagation axis, wherein the optical waveguide has an end with a reflecting facet, and wherein the reflecting facet has an angle of approximately 54.74° with respect to the optical waveguide propagation axis, and
an optical detector disposed on top of the optical waveguide, wherein a bottom surface of the optical detector is in direct physical contact with a top surface of the optical waveguide, wherein the reflecting facet is configured to reflect light from the optical waveguide into the optical detector, wherein refractive indices of the optical waveguide and the optical detector are approximately equal, thereby causing light propagating in the optical waveguide along the optical waveguide propagation axis to be reflected by the reflecting facet so that the reflected light enters and propagates in the optical detector at an angle of approximately 70.52° with respect to the bottom surface of the optical detector,
wherein the optical waveguide has a thickness between 0.25 μm and 3 μm measured along a first direction that is normal to the top surface of the optical waveguide, wherein the optical waveguide has a width between 0.5 μm and 3 μm measured along a second direction that is parallel to the top surface of the optical waveguide and perpendicular to the optical waveguide propagation axis, wherein the optical detector has a thickness between 0.5 μm and 3.5 μm measured along the first direction, wherein the optical detector has a width between 2 μm and 5 μm measured along the second direction, and wherein the optical detector has a length between 3 μm and 6 μm measured along the optical propagation axis.

12. The system of claim 11 , wherein the semiconductor layer includes silicon.

13. The system of claim 11 , wherein the reflective facet is defined using an anisotropic etch of the semiconductor layer.

14. The system of claim 11 , wherein the optical detector includes germanium.

15. The system of claim 11 , further comprising:
a substrate; and
a buried-oxide layer disposed on the substrate, wherein the semiconductor layer is disposed on the buried-oxide layer.

16. The system of claim 15 , wherein the substrate includes a semiconductor.

17. The system of claim 15 , wherein the substrate, the buried-oxide layer and the semiconductor layer comprise a silicon-on-insulator technology.

Assignees

• Shubin Ivan
• Cunningham John E
• Oracle Int Corp

Inventors

• Shubin Ivan
• Cunningham John E

Classifications

• G02B6/4214

  the intermediate optical element having redirecting reflective means, e.g. mirrors, prisms for deflecting the radiation from horizontal to down- or upward direction toward a device (G02B6/4246 takes precedence) · CPC title

• G02B6/1228

  Tapered waveguides, e.g. integrated spot-size transformers (for coupling with fibres G02B6/305) · CPC title

• G02B6/12004 Primary

  Combinations of two or more optical elements · CPC title