Workpiece transfer apparatus

Patent metadata

Field	Value
Publication number	US-9159601-B2
Application number	US-201213359306-A
Country	US
Kind code	B2
Filing date	Jan 26, 2012
Priority date	Feb 4, 2011
Publication date	Oct 13, 2015
Grant date	Oct 13, 2015

Abstract

A workpiece transfer apparatus includes a stationary base, an elevation base, first and second arms, a workpiece-holding hand, and a driving mechanism for the hand. The first arm is supported on the elevation base so as to be rotatable about a first vertical axis. The second arm is supported on the distal end of the first arm such that the second arm is rotatable about a second vertical axis. The hand is supported on the distal end of the second arm so as to be rotatable about a third vertical axis. A motor is arranged in the first arm, whereas a transmission is arranged to extend in a region from the interior of the first arm through the interior of the second arm.

First claim

The invention claimed is:

1. A workpiece transfer apparatus comprising:
a stationary base;
an elevation base vertically movably supported by the stationary base;
a first arm and a second arm each of which includes a base end and a distal end;
a hand for holding a workpiece; and
a hand driving mechanism for driving the hand for rotation, wherein:
the base end of the first arm is supported on the elevation base such that the first arm is rotatable about a first vertical axis,
the base end of the second arm is supported on the distal end of the first arm such that the second arm is rotatable about a second vertical axis,
the hand is supported on the distal end of the second arm such that the hand is rotatable about a third vertical axis,
the hand driving mechanism includes a motor and a transmission mechanism for transmitting rotational output of the motor to the hand,
the motor is arranged in the first arm, and the transmission mechanism is arranged to extend in a region from an interior of the first arm through an interior of the second arm, and
wherein the transmission mechanism comprises:
a speed reducer for reducing rotation speed of an output shaft of the motor, the speed reducer being disposed right below the motor;
an intermediate transmission shaft including a first end and a second end and arranged rotatably about the second vertical axis;
an operation shaft including a first end and a second end and arranged rotatably about the third vertical axis;
a first through a fourth pulleys; and
a first and a second endless belts,
the first pulley being attached to an output shaft of the speed reducer, the second pulley being attached to the first end of the intermediate transmission shaft, the first endless belt being wound around the first pulley and the second pulley, the third pulley being attached to the second end of the intermediate transmission shaft, the fourth pulley being attached to the first end of the operation shaft, the second endless belt being wound around the third pulley and the fourth pulley, and the second end of the operation shaft being connected to the hand,
the first arm including a projecting portion projecting downward, wherein the first pulley, the second pulley and the first endless belt are arranged in the projecting portion.

2. The workpiece transfer apparatus according to claim 1 , further comprising a wiring extending from the stationary base to the hand via the first and the second arms, and a slip ring arranged at a portion of the wiring.

3. The workpiece transfer apparatus according to claim 1 , further comprising an additional hand for holding a workpiece, and an additional hand driving mechanism for driving the additional hand for rotation, wherein:
the additional hand is supported on the distal end of the second arm such that the additional hand is rotatable about the third vertical axis,
the additional hand driving mechanism includes an additional motor and an additional transmission mechanism for transmitting rotational output of the additional motor to the additional hand, and
the additional motor is arranged in the first arm, and the additional transmission mechanism is arranged to extend in a region from an interior of the first arm through an interior of the second arm.

4. The workpiece transfer apparatus according to claim 3 , wherein the additional transmission mechanism comprises:
an additional speed reducer for reducing rotation speed of an output shaft of the additional motor;
an additional intermediate transmission shaft including a first end and a second end and arranged rotatably about the second vertical axis;
an additional operation shaft including a first end and a second end and arranged rotatably about the third vertical axis;
a first through a fourth additional pulleys; and
a first and a second additional endless belts;
the first additional pulley being attached to an output shaft of the additional speed reducer, the second additional pulley being attached to the first end of the additional intermediate transmission shaft, the first additional endless belt being wound around the first additional pulley and the second additional pulley, the third additional pulley being attached to the second end of the additional intermediate transmission shaft, the fourth additional pulley being attached to the first end of the additional operation shaft, the second additional endless belt being wound around the third additional pulley and the fourth additional pulley, and the second end of the additional operation shaft being connected to the additional hand.

5. The workpiece transfer apparatus according to claim 3 , wherein part of the additional transmission mechanism is arranged in the projecting portion.

6. The workpiece transfer apparatus according to claim 3 , further comprising a wiring extending from the stationary base to the hand and the additional hand via the first and the second arms, and a slip ring arranged at a portion of the wiring.

7. The workpiece transfer apparatus according to claim 1 , wherein the projecting portion of the first arm is spaced apart from the elevation base as viewed in a direction parallel to the first vertical axis.

8. The workpiece transfer apparatus according to claim 7 , wherein the elevation base includes an upper surface facing a part of the first arm, and the projecting portion of the first arm projects downward beyond the upper surface of the elevation base.

9. The workpiece transfer apparatus according to claim 5 , wherein the projecting portion of the first arm is spaced apart from the elevation base as viewed in a direction parallel to the first vertical axis.

10. The workpiece transfer apparatus according to claim 9 , wherein the elevation base includes an upper surface facing a part of the first arm, and the projecting portion of the first arm projects downward beyond the upper surface of the elevation base.

11. The workpiece transfer apparatus according to claim 1 , wherein the motor is disposed at a position closer to the second vertical axis than the first vertical axis.

Assignees

• Matsuzaki Yoshiyuki
• Hoshijima Kota
• Maetani Haruo
• Daihen Corp

Inventors

• Matsuzaki Yoshiyuki
• Hoshijima Kota
• Maetani Haruo

Classifications

• H10P72/3402 Primary

  Mechanical parts of transfer devices · CPC title

• B25J9/046

  Revolute coordinate type · CPC title

• B25J15/0014

  having fork, comb or plate shaped means for engaging the lower surface on a object to be transported · CPC title

• B25J9/126

  Rotary actuators · CPC title

• B25J11/0095

  Manipulators transporting wafers · CPC title