Method and apparatus for three dimensional large area welding and sealing of optically transparent materials

Patent metadata

Field	Value
Publication number	US-9156238-B2
Application number	US-201414259779-A
Country	US
Kind code	B2
Filing date	Apr 23, 2014
Priority date	Sep 21, 2011
Publication date	Oct 13, 2015
Grant date	Oct 13, 2015

Abstract

Methods and systems for three dimensional large area welding and sealing of optically transparent materials are disclosed, including generating a beam of ultra-short pulses from an ultra-short pulsed laser; directing the beam to an acoustic-optic modulator to control the repetition rate of the beam; directing the beam to an attenuator after passing through the acoustic-optic modulator to control the energy of the beam; directing the beam to a focusing lens after passing through the attenuator to focus the beam between a top substrate and a bottom substrate in order to weld the top substrate to the bottom substrate, wherein the top substrate and the bottom substrate are in intimate contact; and controlling the position of the top substrate and the bottom substrate relative to the beam using a three-axis stage in order to weld the top substrate to the bottom substrate at different points. Other embodiments are described and claimed.

First claim

The invention claimed is:

1. An apparatus for sealing and welding optically transparent substrates comprising:
an ultra-short pulse laser to produce a beam of ultra-short laser pulses, wherein the beam comprises a pulse duration, a wavelength, a repetition rate, and a pulse energy;
an acoustic-optic-modulator at the output of the ultra-short pulse laser to control the repetition rate of the beam;
an attenuator to control the pulse energy of the beam after passing through the acoustic modulator;
a focusing lens to focus the beam between a top substrate and a bottom substrate, wherein the top substrate and the bottom substrate are substantially in contact; and
a three-axis stage to control the position of the top substrate and the bottom substrate relative to the beam;
wherein the top substrate and the bottom substrate are held together in a fixture comprising a top plate atop the top substrate, a bottom plate below the bottom substrate, and a protrusion between the bottom substrate and the bottom plate;
wherein the top plate and the bottom plate are mechanically coupled together to press the top substrate and the bottom substrate together; and
wherein the protrusion comprises segments of a cylinder or a torus.

2. The apparatus of claim 1 , wherein the bottom plate comprises the protrusion.

3. The apparatus of claim 1 , wherein the fixture further comprises a cushion between the bottom substrate and the protrusion.

4. The apparatus of claim 1 , wherein the pulse duration is in the range between approximately 1 fs to 50 ps, wherein the wavelength is in the range between approximately 100 nm to 10 μm, wherein the repetition rate is in the range between approximately 1 kHz to 100 MHz, wherein the energy is in the range between approximately 0.01 ρJ to 100 mJ, and wherein the beam is scanned over the top substrate between approximately 0.01 mm/s to 500 mm/s.

5. The apparatus of claim 1 , wherein the top substrate and the bottom substrate exhibit nonlinear absorption of the beam.

6. The apparatus of claim 1 , wherein the top substrate is any of glass, polymer, silicon, germanium, gallium, gallium arsenide, silicon carbide, arsenide, indium gallium arsenide, and an alloy including at least one of these.

7. The apparatus of claim 1 , wherein the bottom substrate is any of glass, metal, polymer, silicon, germanium, gallium, gallium arsenide, silicon carbide, arsenide, indium gallium arsenide, and an alloy including at least one of these.

8. The apparatus of claim 1 , wherein the top substrate and the bottom substrate are composed of the same material.

9. The apparatus of claim 1 , wherein the top substrate and the bottom substrate are composed of different materials.

Assignees

• Liu Jian
• Huang Huan
• Polaronyx Inc

Inventors

• Liu Jian
• Huang Huan

Classifications

• B32B37/06 Primary

  characterised by the heating method · CPC title

• B29C66/74611

  Carbides; Nitrides · CPC title

• B29C66/939

  characterised by specific speed values or ranges · CPC title

• B29C65/1606

  Ultraviolet [UV] radiation, e.g. by ultraviolet excimer lasers · CPC title

• B29C66/301

  Three-dimensional joints, i.e. the joined area being substantially non-flat (B29C66/5223, B29C66/5224, B29C66/5225 take precedence) · CPC title