Extreme ultraviolet light generation system
US-2015102239-A1 · Apr 16, 2015 · US
System and method of simultaneously fueling and mitigating debris for a plasma-based illumination source
US9155180B1 · US · B1
| Field | Value |
|---|---|
| Publication number | US-9155180-B1 |
| Application number | US-201213647826-A |
| Country | US |
| Kind code | B1 |
| Filing date | Oct 9, 2012 |
| Priority date | Oct 10, 2011 |
| Publication date | Oct 6, 2015 |
| Grant date | Oct 6, 2015 |
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- Title
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Abstract
Official abstract text for this publication.
The disclosure is directed to a system and method of fueling and mitigating debris for an illumination source. An illumination system may include a plasma-based illumination source. The illumination system may provide illumination along an illumination path emanating from an illumination origin of the illumination source. A gas jet nozzle may be disposed at a selected distance from the illumination origin or proximate to the illumination origin. The gas jet nozzle may be configured to provide fuel gas to fuel the plasma-based illumination source. The gas jet nozzle may be further configured to provide fuel gas in a selected direction substantially opposite to a direction of illumination emanating from the illumination origin to remove at least a portion of debris from the illumination path.
First claim
Opening claim text (preview).
What is claimed is: 1. A system of fueling and mitigating debris for an illumination source, comprising: a gas jet nozzle configured to provide fuel gas to a plasma-based illumination source in a selected direction substantially opposite to a direction of illumination emanating from an illumination origin of the plasma-based illumination source along an illumination path, wherein fuel gas fuels the plasma-based illumination source and removes at least a portion of debris from the…
Assignees
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Classifications
- H05H1/00Primary
Electricity · mapped topic
- G03F7/70916Primary
Physics · mapped topic
Electricity · mapped topic
Electricity · mapped topic
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Frequently asked questions
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- What does patent US9155180B1 cover?
- The disclosure is directed to a system and method of fueling and mitigating debris for an illumination source. An illumination system may include a plasma-based illumination source. The illumination system may provide illumination along an illumination path emanating from an illumination origin of the illumination source. A gas jet nozzle may be disposed at a selected distance from the illumina…
- Who is the assignee on this patent?
- Kla Tencor Corp
- What technology area does this patent fall under?
- Primary CPC classification H05H1/00. Mapped technology areas include Electricity.
- When was this patent published?
- Publication date Tue Oct 06 2015 00:00:00 GMT+0000 (Coordinated Universal Time) (B1). Legal status and post-grant events are not shown on this page.
- What related patents are in patentsdb?
- We list 1 related publication on this page (citations in our corpus or others sharing the same primary CPC).