Solid-state imaging device, manufacturing method thereof, and electronic apparatus

Patent metadata

Field	Value
Publication number	US-9153612-B2
Application number	US-201213370400-A
Country	US
Kind code	B2
Filing date	Feb 10, 2012
Priority date	Feb 24, 2011
Publication date	Oct 6, 2015
Grant date	Oct 6, 2015

Abstract

A solid-state imaging device includes a plurality of photoelectric conversion portions each provided to correspond to each of a plurality of pixels in a semiconductor substrate and receiving incident light through a light sensing surface, and a pixel separation portion that is embedded into a trench provided on a side portion of the photoelectric conversion portion and electrically separates the plurality of pixels in a side of an incident surface of the semiconductor substrate into which the incident light enters. The pixel separation portion is formed by an insulation material which absorbs the incident light entering the light sensing surface.

First claim

What is claimed is:

1. A solid-state imaging device comprising:
a semiconductor substrate having a light sensing surface and a non-light sensing surface;
a plurality of photoelectric conversion portions each provided to correspond to each of a plurality of pixels in the semiconductor substrate and receiving incident light through the light sensing surface;
a pixel separation portion that is embedded into a trench provided on a side portion of the photoelectric conversion portion and electrically separates the plurality of pixels in a side of an incident surface of the semiconductor substrate into which the incident light enters,
wherein the pixel separation portion is formed by an insulation material which absorbs the incident light entering the light sensing surface;
a wiring layer provided on the non-light sensing surface of the semiconductor substrate;
a silicon oxide insulating film with a light sensing surface and a non-light sensing surface, wherein both the light sensing surface and the non-light sensing surface are entirely planar;
a substantially transparent planarized film disposed on at least a portion of the light sensing surface of the silicon oxide insulating film; and
a light shielding film with a light incident surface and a non-light incident surface, wherein the light shielding film is disposed between the silicon oxide insulating film and the substantially transparent planarized film, and wherein the non-light sensing surface of the light shielding film is in direct contact with at least a portion of the light sensing surface of the silicon oxide insulating film.

2. The solid-state imaging device according to claim 1 , further comprising:
a color filter through which the incident light is transmitted to the light sensing surface,
wherein the color filter includes a plurality of kinds of filter layers having a higher transmissivity with respect to light of wavelength ranges different from one another are disposed so as to be adjacent to one another corresponding to each of the plurality of pixels, and
the pixel separation portion is formed so as to selectively absorb light having at least one wavelength range among a plurality of different wavelength ranges in the plurality of kinds of filter layers.

3. The solid-state imaging device according to claim 2 ,
wherein the pixel separation portion is formed so as to at least selectively absorb light of a wavelength range of the shortest wavelength among a plurality of different wavelength ranges in the plurality of kinds of filter layers.

4. The solid-state imaging device according to claim 3 ,
wherein a first filter layer having a high transmissivity with respect to light of a first wavelength range of the shortest wavelength and a second filter layer having a high transmissivity with respect to light of a second wavelength range having a longer wavelength than a wavelength of the first wavelength range among the plurality of wavelength ranges are at least provided as the plurality of kinds of filter layers in the color filter,
each of the first filter layer and the second filter layer is disposed so as to be adjacent to each other corresponding to each of the plurality of pixels, and
the pixel separation portion is formed so as to at least selectively absorb light of the first wavelength range.

5. The solid-state imaging device according to claim 4 ,
wherein the pixel separation portion includes,
a first light absorption portion that selectively absorbs the light of the first wavelength range, and
a second light absorption portion that selectively absorbs the light of the second wavelength range, and
the first light absorption portion and the second light absorption portion are provided so as to be laminated in the trench.

6. The solid-state imaging device according to claim 5 ,
wherein the second light absorption portion is formed on a bottom side of the trench and the first light absorption portion is formed so as to be laminated on the second light absorption portion in the upper portion side of the trench in the pixel separation portion.

7. The solid-state imaging device according to claim 5 ,
wherein a third filter layer having a high transmissivity with respect to light of a third wavelength range which has a longer wavelength than a wavelength of the second wavelength range is further provided as the plurality of kinds of filter layers in the color filter,
the third filter layer is disposed along with each of the first filter layer and the second filter layer so as to be adjacent to one another corresponding to each of the plurality of pixels,
the pixel separation portion further includes a third light absorption portion which selectively absorbs light of the third wavelength range, and
the third light absorption portion is provided along with the first light absorption portion and the second light absorption portion so as to be laminated in the trench.

8. The solid-state imaging device according to claim 7 ,
wherein the third light absorption portion is formed on a bottom side of the trench, the second light absorption portion is formed so as to be laminated on the third light absorption portion, and the first light absorption is formed so as to be laminated on the second light absorption portion, in the pixel separation portion.

9. The solid-state imaging device according to claim 1 , further comprising:
a pixel transistor provided on the non-light sensing surface of the semiconductor substrate and outputs a signal charge generated by the photoelectric conversion portion as an electric signal, wherein the pixel transistor is in electrical contact with the wiring layer.

10. The solid-state imaging device according to claim 1 ,
wherein the pixel separation portion is formed by a material having a refractive index different from a refractive index of the semiconductor substrate.

11. The solid-state imaging device according to claim 1 , further comprising:
a pinning layer that is formed so as to cover a surface in the trench in the semiconductor substrate.

12. The solid-state imaging device according to claim 4 ,
wherein the pixel separation portion is formed by a silicon nitride film which is formed by an ALD (Atomic Layer Deposition) method.

13. The solid-state imaging device according to claim 4 ,
wherein the pixel separation portion is formed by a resin which includes a black pigment.

14. A method of manufacturing a solid-state imaging device comprising:
providing a semiconductor substrate having a light sensing surface and a non-light sensing surface;
providing a plurality of photoelectric conversion portions which receive incident light through a light sensing surface so as to correspond to a plurality of pixels in the semiconductor substrate;
forming a pixel separation portion that electrically separates the plurality of pixels so as to be embedded into a trench provided on a side portion of the photoelectric conversion portion in a side of an incident surface of the semiconductor substrate into which the incident light enters,
wherein the pixel separation portion is formed by an insulation material which absorbs the incident light entering the light sensing surface when forming the pixel separation portion;
providing a wiring layer on the non-light sensing surface of the semiconductor substrate;
providing a silicon oxide insulating film with a light sensing surface and a non-light sensing surface, wherein both the light sensing surface and the non-light sensing surface are entirely planar;
providing a substantially transparent planarized film disposed on at least a portion of the light sensing surface of t

Assignees

• Miyanami Yuki
• Sony Corp

Inventors

• Miyanami Yuki

Classifications

• H04N9/03

  Circuitry for demodulating colour component signals modulated spatially by colour striped filters by frequency separation · CPC title

• H04N25/778

  comprising amplifiers shared between a plurality of pixels, i.e. at least one part of the amplifier must be on the sensor array itself · CPC title

• H04N25/78

  Readout circuits for addressed sensors, e.g. output amplifiers or A/D converters · CPC title

• H10F39/8057

  Optical shielding · CPC title

• H10F39/8053 Primary

  Colour filters · CPC title