Near field transducer having sacrificial structure

Patent metadata

Field	Value
Publication number	US-9153277-B2
Application number	US-201414535522-A
Country	US
Kind code	B2
Filing date	Nov 7, 2014
Priority date	Nov 8, 2013
Publication date	Oct 6, 2015
Grant date	Oct 6, 2015

Abstract

Near field transducers (NFTs) and devices that include a peg having an air bearing region and an opposing back region, the back region including a sacrificial structure, a disc having a first surface in contact with the peg, and a barrier structure, the barrier structure positioned between the opposing back region of the peg and the first surface of the disc.

First claim

What is claimed is:

1. A near field transducer (NFT) comprising:
a peg having an air bearing region and an opposing back region, the back region comprising a sacrificial structure,
a disc having a first surface in contact with the peg, and
a barrier structure, the barrier structure positioned between the opposing back region of the peg and the first surface of the disc.

2. The NFT according to claim 1 , wherein the barrier structure comprises a metal.

3. The NFT according to claim 2 , wherein the barrier structure comprises tungsten (W), rhodium (Rh), ruthenium (Ru), titanium (Ti), iridium (Ir), molybdenum (Mo), niobium (Nb), tantalum (Ta), nickel (Ni), hafnium (Hf), neodymium (Nd), holmium (Ho), zirconium (Zr), yttrium (Y), or combinations thereof.

4. The NFT according to claim 2 , wherein the barrier structure comprises tungsten (W), rhodium (Rh), ruthenium (Ru), titanium (Ti), iridium (Ir), or combinations thereof.

5. The NFT according to claim 1 , wherein the barrier structure comprises aluminum nitride (AlN), boron nitride (BN), zirconium nitride (ZrN), chromium nitride (CrN), titanium aluminum nitride (TiAlN), titanium silicon nitride (TiSiN), titanium nitride (TiN), titanium carbide (TiC), tungsten carbide (WC), or combinations thereof.

6. The NFT according to claim 1 , wherein the barrier structure comprises a void.

7. The NFT according to claim 1 , wherein the sacrificial structure comprises the back surface of the peg.

8. The NFT according to claim 1 , wherein the sacrificial structure is at the back region of the peg comprises at least one angle less than 90 degrees.

9. The NFT according to claim 8 , wherein the sacrificial structure comprises a slanted back surface.

10. The NFT according to 8 , wherein the sacrificial structure comprises a pointed back surface.

11. The NFT according to claim 1 , wherein the sacrificial structure is at the back region of the peg and has at least one dimension that is less than that same dimension at the air bearing surface of the peg.

12. A method of forming a near field transducer (NFT), the method comprising:
forming a peg of the NFT, the peg having a peg having an air bearing region and an air bearing surface (ABS) and a back region, opposing the air bearing region, wherein the back region comprises a sacrificial structure;
forming a barrier structure on at least the back region and the back surface of the peg; and
forming a disc of the NFT, the disc positioned over at least the barrier structure.

13. The method according to claim 12 , wherein the peg is formed using photopatterning.

14. The method according to claim 12 , wherein formation of the barrier structure comprises photopatterning and deposition of a metal.

15. The method according to claim 12 , wherein formation of the barrier structure is formed using photopatterning and angled deposition of the material of the disc.

16. A system comprising:
a device comprising:
an energy source;
a waveguide, the waveguide configured to transmit energy from the energy source;
a near field transducer (NFT) the NFT comprising:
a peg having an air bearing region and an opposing back region, the back region comprising a sacrificial structure,
a disc having a first surface in contact with the peg, and
a barrier structure, the barrier structure positioned between the opposing back region of the peg and the first surface of the disc; and

wherein the energy source is configured to transmit energy to the waveguide and the waveguide is configured to transmit energy to the NFT; and
a magnetic writer; and

magnetic recording media,
wherein energy from the energy source is transmitted via the waveguide to the NFT and the NFT transmits energy to the magnetic recording media to assist the magnetic writer in writing data to the magnetic recording media.

17. The system according to claim 16 , wherein the barrier structure comprises a metal.

18. The system according to claim 16 , wherein the barrier structure comprises a void.

19. The system according to claim 16 , wherein the peg further comprises an air bearing surface (ABS), and wherein the back region of the peg has a back surface that is oblique to the air bearing surface of the NFT.

20. The system according to claim 16 , wherein the sacrificial structure comprises the back surface of the peg and the sacrificial structure comprises at least one angle less than 90 degrees.

Assignees

• Seagate Technology Llc

Inventors

• Zhao Tong
• Huang Xiaoyue
• Kautzky Michael C
• Brickner Hui
• Wu Yi-Kuei Ryan

Classifications

• G03F7/20

  Exposure; Apparatus therefor (photographic printing apparatus for making copies G03B27/00) · CPC title

• G11B5/6088

  Optical waveguide in or on flying head · CPC title

• G11B5/314 Primary

  where the layers are extra layers normally not provided in the transducing structure, e.g. optical layers (G11B5/3196 takes precedence) · CPC title

• G03F7/26

  Processing photosensitive materials; Apparatus therefor (G03F7/12 - G03F7/24 take precedence) · CPC title

• G11B5/4866

  the arm comprising an optical waveguide, e.g. for thermally-assisted recording · CPC title