Method of polishing a metal surface of a barrier door of a gate valve used in a semiconductor cluster tool architecture

Patent metadata

Field	Value
Publication number	US-9151408-B2
Application number	US-201213482278-A
Country	US
Kind code	B2
Filing date	May 29, 2012
Priority date	Feb 7, 2012
Publication date	Oct 6, 2015
Grant date	Oct 6, 2015

Abstract

The method of preserving the anodized finish of a barrier door of a process module includes bonding a seal to a metal surface, anodizing the metal surface, and then using a CNC machine to polish the metal surface without damaging the seal. The metal surface is polished by traversing a polishing path along the metal surface with a polishing head maintaining frictional contact with the metal surface. The integrity of the seal is preserved by bounding the polishing head to skirt the edge of the seal by following the polishing path.

First claim

What is claimed is:

1. A method of polishing a metal sealing surface of a barrier door of a gate valve, the method comprising:
bonding a vacuum seal within a groove, wherein the groove is formed in the metal sealing surface of the barrier door, wherein the metal sealing surface seals to an exterior wall of the gate valve when closing off an opening in the wall, and wherein the opening provides access to an interior of a plasma chamber;
after the vacuum seal is bonded to the metal sealing surface, anodizing a first portion of the metal sealing surface without anodizing an interior face of the barrier door, wherein the interior face is separate from the metal sealing surface and is exposed to the interior of the plasma chamber when the barrier door is sealed to the wall of the gate valve, and wherein the metal sealing surface and the interior face are planar surfaces that extend parallel to each other;
subsequent to anodizing the first portion of the metal sealing surface, traversing a polishing path along the first portion of the metal sealing surface with a polishing head between (i) the interior face and (ii) an edge of the vacuum seal closest to the interior face, wherein the polishing head engages in frictional contact with the metal sealing surface; and
while the polishing path is traversed, skirting an edge of the vacuum seal with the polishing head including polishing at least a second portion of the metal sealing surface abutting the edge without touching the vacuum seal.

2. The method of claim 1 , wherein the metal sealing surface comprises aluminum.

3. The method of claim 1 , wherein the metal sealing surface is a type III hard anodized coating that penetrates the metal sealing surface.

4. The method of claim 1 , wherein the vacuum seal comprises an elastomer material.

5. The method of claim 4 , wherein the vacuum seal comprises rubber.

6. The method of claim 4 , wherein the vacuum seal is a fluoroelastomer seal.

7. The method of claim 4 , wherein the vacuum seal is a perfluoroelastomer seal.

8. The method of claim 4 , wherein the vacuum seal is vulcanized while the vacuum seal is bonded to the metal sealing surface.

9. The method of claim 8 , wherein the vacuum seal is vulcanized at a temperature between 350° F. and 370° F.

10. The method of claim 8 , further comprising, subsequent to the vulcanizing of the vacuum seal, post curing that vacuum seal at about 400° F.,
wherein the vacuum seal is vulcanized at a temperature between 350° F. and 370° F.

11. The method of claim 1 , wherein the vacuum seal is a removable o-ring.

12. The method of claim 1 , wherein the metal sealing surface is polished to a surface finish of less than about 8 Ra.

13. The method of claim 1 , wherein the polishing head is moved with a computer numerical control machine.

14. The method of claim 1 , wherein the polishing path comprises a parallel path with respect to the edge of the vacuum seal.

15. The method of claim 1 , wherein the groove has an unanodized surface and the vacuum seal is bonded to the unanodized surface of the groove.

16. A method of polishing a metal sealing surface of a barrier door of a gate valve, the method comprising:
vulcanizing an elastomer seal at a temperature between 350° F. and 370° F. such that the elastomer seal is bonded within a groove of the metal sealing surface, wherein the metal sealing surface seals to an exterior wall of the gate valve when closing off an opening in the wall, and wherein the opening provides access to an interior of a plasma chamber;
after the elastomer seal is bonded to the metal sealing surface, anodizing a first portion of the metal sealing surface without anodizing an interior face of the barrier door, wherein the interior face is separate from the metal sealing surface and is exposed to the interior of the plasma chamber when the barrier door is sealed to the wall of the gate valve, and wherein the metal sealing surface and the interior face are planar surfaces that extend parallel to each other;
subsequent to anodizing the first portion of the metal sealing surface, traversing a polishing path along the metal sealing surface with a polishing head between (i) the interior face and (ii) an edge of the elastomer seal closest to the interior face, wherein the polishing head engages in frictional contact with the metal sealing surface;
polishing at least a second portion of the metal sealing surface abutting the edge without touching the elastomer seal to a surface finish of less than 8 Ra, wherein the first portion includes the second portion; and
while the polishing path is traversed, skirting the edge of the elastomer seal with the polishing head.

17. The method of claim 1 , wherein the polishing path is a path that alternates between (i) extending in a direction parallel to the edge of the vacuum seal and (ii) extending in a direction perpendicular to the edge of the vacuum seal.

18. The method of claim 1 , wherein, while following the polishing path with the polishing head, the polishing of the portion of the metal sealing surface is conducted in an alternating manner between parallel and perpendicular directions with respect to the edge of the vacuum seal.

19. The method of claim 1 , wherein the polishing path is an overlapping and circular path that extends in a direction parallel to the edge of the vacuum seal.

20. The method of claim 1 , wherein the interior face is recessed from the metal sealing surface.

Assignees

• Larson Dean J
• Woodward James A
• Lam Res Corp

Inventors

• Larson Dean J
• Woodward James A

Classifications

• F16K51/02 Primary

  specially adapted for high-vacuum installations · CPC title

• F16K3/0263

  using particular material or covering means · CPC title

• B24B29/00

  Machines or devices for polishing surfaces on work by means of tools made of soft or flexible material with or without the application of solid or liquid polishing agents (polishing tools in general B24D13/00) · CPC title

• B24B15/00

  Machines or devices designed for grinding seat surfaces; Accessories therefor (for spherical surfaces in general B24B11/00) · CPC title