Information processing device, substrate processing device, and information processing method
US-2024302817-A1 · Sep 12, 2024 · US
US9145271B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9145271-B2 |
| Application number | US-201314018887-A |
| Country | US |
| Kind code | B2 |
| Filing date | Sep 5, 2013 |
| Priority date | Sep 18, 2012 |
| Publication date | Sep 29, 2015 |
| Grant date | Sep 29, 2015 |
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Official abstract text for this publication.
A system and method for the handling of workpieces in a workpiece processing system is disclosed. The system utilizes three conveyor belts, where one may be a loading belt, feeding unprocessed workpieces from its associated workpiece carrier to a processing system. A second conveyor belt may be an unloading belt, receiving processed workpieces from the processing system and filling its associated workpiece carrier. The third conveyor belt may be exchanging its workpiece carrier during this time, so that it is available to start operating as the loading belt once all of the workpieces have been removed from the workpiece carrier associated with the first conveyor belt.
Opening claim text (preview).
What is claimed is: 1. A workpiece handling system, comprising: three conveyer belts; three indexers, each associated with a respective conveyor belt, each adapted to hold a workpiece carrier; and a stocker robot to exchange a workpiece carrier disposed on one of said indexers; wherein a direction of travel for each of said three conveyor belts can be changed, allowing each of said conveyor belts to operate, at different times, as a loading belt and as a unloading belt and w…
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