Temperature sensing probe, burl plate, lithographic apparatus and method

Patent metadata

Field	Value
Publication number	US-9141005-B2
Application number	US-201213488111-A
Country	US
Kind code	B2
Filing date	Jun 4, 2012
Priority date	Jun 6, 2011
Publication date	Sep 22, 2015
Grant date	Sep 22, 2015

Abstract

A temperature sensing probe including a temperature sensor in an elongate housing wherein the elongate housing of the probe is elongate in a first direction and the elongate housing is comprised of a material which has a thermal conductivity of at least 500 W/mK at 20° C. in at least one direction.

First claim

The invention claimed is:

1. A burl plate for a lithographic apparatus, the burl plate comprising:
a main body comprising an object supporting surface; and
a temperature sensing probe comprising a temperature sensor in an elongate housing, wherein the elongate housing is elongate in a first direction transverse to the object supporting surface, contacts the main body along at least part of its length, and is comprised of a material with a thermal conductivity of at least 100 W/mK at 20° C. in at least one direction.

2. The burl plate of claim 1 , wherein the sensor is inserted in a hole in the main body to measure an average temperature of the surface of the hole.

3. The burl plate of claim 2 , wherein the main body comprises two parts and the hole is elongate in a substantially perpendicular direction to a plane in which the two parts of the main body are joined.

4. The burl plate of claim 3 , wherein the distance the hole extends through a first part of the two parts is substantially equal to the distance the hole extends through a second part of the two parts.

5. The burl plate of claim 2 , wherein the hole is a blind hole.

6. The burl plate of claim 1 , further comprising a heater on a surface of the main body opposite to a surface on which a substrate is to be positioned, in use.

7. The burl plate of claim 6 , comprising at least one further heater on the surface.

8. The burl plate of claim 7 , comprising a further temperature sensing probe having a temperature sensor in an elongate housing wherein the elongate housing is elongate and comprised of a material with a thermal conductivity of at least 100 W/mK at 20° C., each of the heaters having an associated temperature sensing probe.

9. A burl plate comprising:
a main body comprising a substrate supporting surface;
a heater on a surface of the main body opposite the substrate supporting surface; and
a temperature sensing probe comprising a housing elongate in a direction transverse to the substrate supporting surface and/or the surface opposite the substrate supporting surface and comprising a temperature sensor, in the housing, configured to measure an average temperature of a part of the main body between the substrate supporting surface and the surface opposite the substrate supporting surface.

10. The burl plate of claim 9 , wherein the elongated housing is comprised of a material with a thermal conductivity of at least 100 W/mK at 20° C.

11. A lithographic apparatus comprising:
a system to impart a pattern on a substrate;
a burl plate comprising a main body, the main body comprising an object supporting surface; and
a temperature sensing probe, comprising a temperature sensor in an elongate housing, wherein the elongate housing is elongate in a first direction transverse to the object supporting surface, contacts the main body along at least part of its length, and is comprised of a material with a thermal conductivity of at least 100 W/mK at 20° C. in at least one direction.

12. A method of compensating for a local heat load in an immersion lithographic projection apparatus, the method comprising:
measuring an average temperature of a part of a main body of a burl plate between a substrate supporting surface of the main body and a surface opposite the substrate supporting surface, using a temperature sensing probe comprising a housing elongate in a direction transverse to the substrate supporting surface and/or the surface opposite the substrate supporting surface and comprising a temperature sensor in the housing; and
controlling a heater on the surface of the main body opposite the substrate supporting surface based on a signal indicative of the average temperature.

13. The burl plate of claim 9 , wherein the sensor is inserted in a hole in the main body to measure an average temperature of the surface of the hole.

14. The lithographic apparatus of claim 11 , wherein the sensor is inserted in a hole in the main body to measure an average temperature of the surface of the hole.

15. A burl plate system for a lithographic apparatus, the burl plate system comprising:
a main body; and
a temperature sensing probe comprising a temperature sensor in a housing, wherein the housing is elongate, contacts the main body along at least part of its length, and is comprised of a material with a thermal conductivity of at least 100 W/mK at 20° C., and wherein the temperature sensor is shorter than the length of the elongate housing.

16. The burl plate system of claim 15 , wherein the sensor is inserted in a hole in the main body to measure an average temperature of the surface of the hole.

17. The burl plate system of claim 16 , wherein the hole is a blind hole.

18. The burl plate system of claim 15 , wherein the housing is elongate in a direction transverse to an object supporting surface of the main body and/or a surface of the main body opposite the object supporting surface.

19. The burl plate system of claim 15 , wherein the temperature sensor is substantially at a center of the elongate housing.

20. The burl plate system of claim 15 , further comprising a system of a lithographic apparatus to impart a pattern on a substrate.

Assignees

• Laurent Thibault Simon Mathieu
• Kusters Gerardus Adrianus Antonius Maria
• Kunnen Johan Gertrudis Cornelis
• Derks Sander Catharina Reinier
• Asml Netherlands Bv

Inventors

• Laurent Thibault Simon Mathieu
• Kusters Gerardus Adrianus Antonius Maria
• Kunnen Johan Gertrudis Cornelis
• Derks Sander Catharina Reinier

Classifications

• G03F7/70875 Primary

  Temperature, e.g. temperature control of masks or workpieces via control of stage temperature · CPC title

• G03F7/707

  Chucks, e.g. chucking or un-chucking operations or structural details · CPC title

• G01K13/00

  Thermometers specially adapted for specific purposes · CPC title