US9136459B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9136459-B2 |
| Application number | US-201213644178-A |
| Country | US |
| Kind code | B2 |
| Filing date | Oct 3, 2012 |
| Priority date | Oct 4, 2011 |
| Publication date | Sep 15, 2015 |
| Grant date | Sep 15, 2015 |
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Official abstract text for this publication.
A piezoelectric device includes: a substrate; a first electrode which is layered over the substrate; a first piezoelectric film which is layered over the first electrode; a metal oxide film which is layered over the first piezoelectric film; a metal film which is layered over the metal oxide film; a second piezoelectric film which is layered over the metal film; and a second electrode which is layered over the second piezoelectric film.
Opening claim text (preview).
What is claimed is: 1. A piezoelectric device, comprising: a substrate; a first electrode which is layered over the substrate; a first piezoelectric film which is layered over the first electrode; an intermediate layer including a metal oxide film and a metal film, wherein the metal oxide film is layered over the first piezoelectric film, and the metal film is layered over the metal oxide film; a second piezoelectric film which is layered over the metal film; and a secon…
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