Semiconductor device having junctionless vertical gate transistor and method of manufacturing the same

US9136376B2 · US · B2

Patent metadata
FieldValue
Publication numberUS-9136376-B2
Application numberUS-201313759395-A
CountryUS
Kind codeB2
Filing dateFeb 5, 2013
Priority dateMar 12, 2012
Publication dateSep 15, 2015
Grant dateSep 15, 2015

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  2. Abstract

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Abstract

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A junctionless vertical gate transistor includes an active pillar vertically protruding from a substrate and including a first impurity region, a second impurity region and a third impurity region sequentially formed over the first impurity region; gate electrodes coupled to sidewalls of the second impurity region; and bit lines arranged in a direction of intersecting with the gate electrodes and each contacting the first impurity region. The first to the third impurity regions include impurities of the same polarity.

First claim

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What is claimed is: 1. A semiconductor device comprising: a plurality of active pillars, each of the active pillars including a first impurity region disposed over a surface of a substrate, a plurality of second impurity regions disposed over the first impurity region, and a plurality of third impurity regions disposed over the plurality of second impurity regions, respectively, wherein the plurality of second impurity regions is arranged at a constant interval over the first impu…

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What does patent US9136376B2 cover?
A junctionless vertical gate transistor includes an active pillar vertically protruding from a substrate and including a first impurity region, a second impurity region and a third impurity region sequentially formed over the first impurity region; gate electrodes coupled to sidewalls of the second impurity region; and bit lines arranged in a direction of intersecting with the gate electrodes a…
Who is the assignee on this patent?
Sk Hynix Inc, Korea Advanced Inst Sci & Tech
What technology area does this patent fall under?
Primary CPC classification H10D30/025. Mapped technology areas include Electricity.
When was this patent published?
Publication date Tue Sep 15 2015 00:00:00 GMT+0000 (Coordinated Universal Time) (B2). Legal status and post-grant events are not shown on this page.
What related patents are in patentsdb?
We list 8 related publications on this page (citations in our corpus or others sharing the same primary CPC).