Power mosfet and manufacturing method thereof
US-2024322032-A1 · Sep 26, 2024 · US
US9136372B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9136372-B2 |
| Application number | US-201213531793-A |
| Country | US |
| Kind code | B2 |
| Filing date | Jun 25, 2012 |
| Priority date | Jun 29, 2011 |
| Publication date | Sep 15, 2015 |
| Grant date | Sep 15, 2015 |
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In a silicon carbide semiconductor device, a plurality of trenches has a longitudinal direction in one direction and is arranged in a stripe pattern. Each of the trenches has first and second sidewalls extending in the longitudinal direction. The first sidewall is at a first acute angle to one of a (11-20) plane and a (1-100) plane, the second sidewall is at a second acute angle to the one of the (11-20) plane and the (1-100) plane, and the first acute angle is smaller than the second acute angle. A first conductivity type region is in contact with only the first sidewall in the first and second sidewalls of each of the trenches, and a current path is formed on only the first sidewall in the first and second sidewalls.
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What is claimed is: 1. A silicon carbide semiconductor device comprising: a silicon carbide semiconductor substrate including a silicon carbide substrate and a drift layer disposed on the silicon carbide substrate, the silicon carbide substrate having one of a first conductivity type and a second conductivity type, the drift layer made of silicon carbide and having the first conductivity type, the silicon carbide semiconductor substrate being an off substrate whose surface has an…
Electricity · mapped topic
Electricity · mapped topic
Electricity · mapped topic
Electricity · mapped topic
Electricity · mapped topic
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