Silicon carbide semiconductor device

US9136372B2 · US · B2

Patent metadata
FieldValue
Publication numberUS-9136372-B2
Application numberUS-201213531793-A
CountryUS
Kind codeB2
Filing dateJun 25, 2012
Priority dateJun 29, 2011
Publication dateSep 15, 2015
Grant dateSep 15, 2015

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  1. Title

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  2. Abstract

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  5. First independent claim

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Abstract

Official abstract text for this publication.

In a silicon carbide semiconductor device, a plurality of trenches has a longitudinal direction in one direction and is arranged in a stripe pattern. Each of the trenches has first and second sidewalls extending in the longitudinal direction. The first sidewall is at a first acute angle to one of a (11-20) plane and a (1-100) plane, the second sidewall is at a second acute angle to the one of the (11-20) plane and the (1-100) plane, and the first acute angle is smaller than the second acute angle. A first conductivity type region is in contact with only the first sidewall in the first and second sidewalls of each of the trenches, and a current path is formed on only the first sidewall in the first and second sidewalls.

First claim

Opening claim text (preview).

What is claimed is: 1. A silicon carbide semiconductor device comprising: a silicon carbide semiconductor substrate including a silicon carbide substrate and a drift layer disposed on the silicon carbide substrate, the silicon carbide substrate having one of a first conductivity type and a second conductivity type, the drift layer made of silicon carbide and having the first conductivity type, the silicon carbide semiconductor substrate being an off substrate whose surface has an…

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What does patent US9136372B2 cover?
In a silicon carbide semiconductor device, a plurality of trenches has a longitudinal direction in one direction and is arranged in a stripe pattern. Each of the trenches has first and second sidewalls extending in the longitudinal direction. The first sidewall is at a first acute angle to one of a (11-20) plane and a (1-100) plane, the second sidewall is at a second acute angle to the one of t…
Who is the assignee on this patent?
Miyahara Shinichiro, Sugimoto Masahiro, Takaya Hidefumi, and 4 more
What technology area does this patent fall under?
Primary CPC classification H10D30/668. Mapped technology areas include Electricity.
When was this patent published?
Publication date Tue Sep 15 2015 00:00:00 GMT+0000 (Coordinated Universal Time) (B2). Legal status and post-grant events are not shown on this page.
What related patents are in patentsdb?
We list 8 related publications on this page (citations in our corpus or others sharing the same primary CPC).