Thin film transistor and manufacturing method thereof

Patent metadata

Field	Value
Publication number	US-9136342-B2
Application number	US-201414495835-A
Country	US
Kind code	B2
Filing date	Sep 24, 2014
Priority date	Sep 7, 2011
Publication date	Sep 15, 2015
Grant date	Sep 15, 2015

Abstract

A thin film transistor is provided. A thin film transistor according to an exemplary embodiment of the present invention includes: a substrate; a gate line disposed on the substrate and including a gate electrode; a semiconductor layer disposed on the substrate and including at least a portion overlapping the gate electrode; a gate insulating layer disposed between the gate line and the semiconductor layer; and a source electrode and a drain electrode disposed on the substrate and facing each other over a channel region of the semiconductor layer. The gate insulating layer includes a first region and a second region, the first region corresponds to the channel region of the semiconductor layer, the first region is made of a first material, the second region is made of a second material, and the first material and the second material have different atomic number ratios of carbon and silicon.

First claim

What is claimed is:

1. A thin film transistor comprising:
a substrate;
a gate line disposed on the substrate and comprising a gate electrode;
a semiconductor layer disposed on the substrate and comprising at least a portion overlapping the gate electrode;
a gate insulating layer disposed between the gate line and the semiconductor layer; and
a source electrode and a drain electrode disposed on the substrate and facing each other over a channel region of the semiconductor layer,
wherein the gate insulating layer comprises a first region and a second region, and the first region corresponds to the channel region of the semiconductor layer; and
wherein the first region is made of a first material having a first atomic number ratio of carbon to silicon, the second region is made of a second material having a second atomic number ratio of carbon to silicon, and the first atomic number ratio is smaller than the second atomic number ratio.

2. The thin film transistor of claim 1 , wherein
a dielectric constant of the first region is larger than the dielectric constant of the second region.

3. The thin film transistor of claim 2 , wherein
a capacitance of a capacitor including the first region is larger than the capacitance of a capacitor including the second region.

4. The thin film transistor of claim 3 , wherein
the gate insulating layer is formed by using a solution type of insulating material.

5. The thin film transistor of claim 4 , wherein
the solution type insulating material comprises organo-siloxane or organo-silsequioxane.

6. The thin film transistor of claim 1 , wherein
a thickness of the first region of the gate insulating layer is substantially the same as that of the second region of the gate insulating layer.

7. The thin film transistor of claim 1 , wherein
the gate insulating layer comprises organo-siloxane or organo-silsequioxane.

8. The thin film transistor of claim 7 , wherein
a capacitance of a capacitor including the first region is larger than a capacitance of a capacitor including the second region.

9. A thin film transistor comprising:
a substrate;
a gate line disposed on the substrate and including a gate electrode;
a semiconductor layer disposed on the substrate and including at least a portion overlapping the gate electrode;
a gate insulating layer disposed between the gate line and the semiconductor layer; and
a source electrode and a drain electrode disposed on the substrate and facing each other over a channel region of the semiconductor layer,
wherein the gate insulating layer includes a first region and a second region, and the first region corresponds to a channel region of the semiconductor layer; and
wherein the first region and the second region are disposed at a same level, a thickness of the gate insulating layer is substantially the same in the first region as in the second region, and an atomic number ratio of carbon to silicon for the first region is smaller than an atomic number ratio of carbon to silicon for the second region, so that dielectric constants of the first region and the second region are different from each other.

Assignees

• Samsung Display Co Ltd

Inventors

• Jeong Yeon Taek
• Kim Bo Sung
• Lee Doo-Hyoung
• Choi June Whan
• Choi Tae-Young
• Masataka Kano

Classifications

• H10D30/6732

  Bottom-gate only TFTs · CPC title

• H10D30/0316

  of lateral bottom-gate TFTs comprising only a single gate · CPC title

• H10D64/68

  characterised by the insulator, e.g. by the gate insulator · CPC title

• H10D30/673 Primary

  characterised by the shapes, relative sizes or dispositions of the gate electrodes · CPC title

• H10D30/6739 Primary

  Conductor-insulator-semiconductor electrodes · CPC title