Memory cells and memory cell formation methods using sealing material

US9136307B2 · US · B2

Patent metadata
FieldValue
Publication numberUS-9136307-B2
Application numberUS-201213369654-A
CountryUS
Kind codeB2
Filing dateFeb 9, 2012
Priority dateFeb 9, 2012
Publication dateSep 15, 2015
Grant dateSep 15, 2015

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  2. Abstract

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  5. First independent claim

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Abstract

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Memory cells, arrays of memory cells, and methods of forming the same with sealing material on sidewalls thereof are disclosed herein. One example of forming a memory cell includes forming a stack of materials, forming a trench to a first depth in the stack of materials such that a portion of at least one of the active storage element material and the active select device material is exposed on sidewalls of the trench. A sealing material is formed on the exposed portion of the at least one of the active storage element material and the active select device material and the trench is deepened such that a portion of the other of the at least one of the active storage element material and the active select device material is exposed on the sidewalls of the trench.

First claim

Opening claim text (preview).

What is claimed is: 1. A method of forming a memory cell, comprising: forming a stack of materials on a conductive material, the stack of materials comprising: an active storage element material in direct contact with and between a first electrode material and a second electrode material; an active select device material in direct contact with and between the second electrode material and a third electrode material; and the conductive material associated with a conductive lin…

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What does patent US9136307B2 cover?
Memory cells, arrays of memory cells, and methods of forming the same with sealing material on sidewalls thereof are disclosed herein. One example of forming a memory cell includes forming a stack of materials, forming a trench to a first depth in the stack of materials such that a portion of at least one of the active storage element material and the active select device material is exposed on…
Who is the assignee on this patent?
Pellizzer Fabio, Micron Technology Inc
What technology area does this patent fall under?
Primary CPC classification H01L27/2427. Mapped technology areas include Electricity.
When was this patent published?
Publication date Tue Sep 15 2015 00:00:00 GMT+0000 (Coordinated Universal Time) (B2). Legal status and post-grant events are not shown on this page.
What related patents are in patentsdb?
We list 8 related publications on this page (citations in our corpus or others sharing the same primary CPC).