Semiconductor memory device
US-2024334693-A1 · Oct 3, 2024 · US
Semiconductor device and method of manufacturing the same
US9136274B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9136274-B2 |
| Application number | US-201213597889-A |
| Country | US |
| Kind code | B2 |
| Filing date | Aug 29, 2012 |
| Priority date | Apr 19, 2012 |
| Publication date | Sep 15, 2015 |
| Grant date | Sep 15, 2015 |
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Abstract
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A semiconductor device includes a substrate including a plurality of active regions divided by a plurality of trenches, a plurality of tunnel insulating layer patterns formed over the active regions, a plurality of conductive film patterns formed over the tunnel insulating film patterns, a plurality of first isolation layers formed on sidewalls and bottom surfaces of the trenches, and a plurality of second isolation layers formed between the conductive film patterns.
First claim
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What is claimed is: 1. A semiconductor device comprising: a substrate including a plurality of active regions divided by a plurality of trenches; a plurality of tunnel insulating layer patterns formed over the active regions; a plurality of conductive film patterns formed over the tunnel insulating film patterns; a plurality of first isolation layers formed over sidewalls and bottom surfaces of the trenches; and a plurality of second isolation layers formed between the con…
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Electricity · mapped topic
Electricity · mapped topic
Electricity · mapped topic
Electricity · mapped topic
Electricity · mapped topic
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Frequently asked questions
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- What does patent US9136274B2 cover?
- A semiconductor device includes a substrate including a plurality of active regions divided by a plurality of trenches, a plurality of tunnel insulating layer patterns formed over the active regions, a plurality of conductive film patterns formed over the tunnel insulating film patterns, a plurality of first isolation layers formed on sidewalls and bottom surfaces of the trenches, and a plurali…
- Who is the assignee on this patent?
- Nam Sang Hyuk, Sk Hynix Inc
- What technology area does this patent fall under?
- Primary CPC classification H10D30/0411. Mapped technology areas include Electricity.
- When was this patent published?
- Publication date Tue Sep 15 2015 00:00:00 GMT+0000 (Coordinated Universal Time) (B2). Legal status and post-grant events are not shown on this page.
- What related patents are in patentsdb?
- We list 8 related publications on this page (citations in our corpus or others sharing the same primary CPC).