Systems and methods for determining and adjusting a level of parallelism related to bonding of semiconductor elements

US9136243B2 · US · B2

Patent metadata
FieldValue
Publication numberUS-9136243-B2
Application numberUS-201414553782-A
CountryUS
Kind codeB2
Filing dateNov 25, 2014
Priority dateDec 3, 2013
Publication dateSep 15, 2015
Grant dateSep 15, 2015

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  2. Abstract

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  5. First independent claim

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Abstract

Official abstract text for this publication.

A bonding machine for bonding semiconductor elements, the bonding machine including: a support structure configured to support a substrate; a bond head assembly, the bond head assembly including a bonding tool configured to bond a plurality of semiconductor elements to the substrate; and a calibration tool including a contact portion configured to be positioned between the bonding tool and the support structure, the contact portion configured to be contacted by each of the bonding tool and the support structure simultaneously during a calibration operation.

First claim

Opening claim text (preview).

What is claimed: 1. A method of determining a level of parallelism between a bonding tool and a support structure of a bonding machine, the method comprising the steps of: (a) positioning a contact portion of a calibration tool between the bonding tool and the support structure; (b) lowering the bonding tool to drive the contact portion of the calibration tool to a contact position within a bonding location of the support structure where the contact portion of the calibration to…

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What does patent US9136243B2 cover?
A bonding machine for bonding semiconductor elements, the bonding machine including: a support structure configured to support a substrate; a bond head assembly, the bond head assembly including a bonding tool configured to bond a plurality of semiconductor elements to the substrate; and a calibration tool including a contact portion configured to be positioned between the bonding tool and the …
Who is the assignee on this patent?
Kulicke & Soffa Ind Inc
What technology area does this patent fall under?
Primary CPC classification H10W72/072. Mapped technology areas include Electricity.
When was this patent published?
Publication date Tue Sep 15 2015 00:00:00 GMT+0000 (Coordinated Universal Time) (B2). Legal status and post-grant events are not shown on this page.
What related patents are in patentsdb?
We list 2 related publications on this page (citations in our corpus or others sharing the same primary CPC).