Testing device, testing method, and non-transitory storage medium storing testing program
US-2024142495-A1 · May 2, 2024 · US
US9134115B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9134115-B2 |
| Application number | US-201414303010-A |
| Country | US |
| Kind code | B2 |
| Filing date | Jun 12, 2014 |
| Priority date | Jul 22, 2013 |
| Publication date | Sep 15, 2015 |
| Grant date | Sep 15, 2015 |
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A vibrating mirror element includes a drive control portion configured to control the driving of a correction drive portion to keep the turning angle velocity of a mirror portion substantially constant by oscillating the mirror portion about an axis at a non-resonance frequency in a direction opposite to a direction in which a resonant drive portion oscillates the mirror portion.
Opening claim text (preview).
What is claimed is: 1. A vibrating mirror element comprising: a mirror portion capable of being oscillated about an axis; a resonant drive portion resonantly driven at a resonance frequency to resonantly drive the mirror portion by oscillating the mirror portion about the axis; a correction drive portion provided outside the resonant drive portion to be capable of oscillating the mirror portion about the axis, configured to non-resonantly drive the mirror portion by correcting…
Physics · mapped topic
Physics · mapped topic
Physics · mapped topic
Physics · mapped topic
Physics · mapped topic
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