Excimer laser and laser device

Patent metadata

Field	Value
Publication number	US-9130338-B2
Application number	US-201313738028-A
Country	US
Kind code	B2
Filing date	Jan 10, 2013
Priority date	Feb 15, 2012
Publication date	Sep 8, 2015
Grant date	Sep 8, 2015

Abstract

An excimer laser may include a frame, a base plate on which the frame is disposed, an excimer laser configured to oscillate and output laser light by discharge-pumping within a chamber containing a laser gas, an optical element that is mounted upon the frame and that is disposed in the optical path of the outputted laser light and a heat removal mechanism connected to both the frame and the base plate.

First claim

What is claimed is:

1. An excimer laser comprising:
a frame;
a base plate on which said frame is disposed;
an excimer laser configured to oscillate and output laser light by discharge-pumping within a chamber containing a laser gas;
an optical element that is mounted upon said frame and that is disposed in the optical path of said outputted laser light;
a heat removal mechanism connected to both said frame and said base plate; and
a heat transfer mechanism having an inte…

Assignees

• Gigaphoton Inc

Inventors

• Kumazaki Takahito
• Matsunaga Takashi
• Takezawa Kazuya

Classifications

• H01S3/08009

  Electricity · mapped topic

• G02B7/008

  Physics · mapped topic

• H01S3/04 Primary

  Electricity · mapped topic

• H01S3/0401

  Electricity · mapped topic

• H01S3/08004

  Electricity · mapped topic