Scanning ion beam deposition and etch
US-12176178-B2 · Dec 24, 2024 · US
Transmission electron microscope, and method of observing specimen
US9129772B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9129772-B2 |
| Application number | US-201414289092-A |
| Country | US |
| Kind code | B2 |
| Filing date | May 28, 2014 |
| Priority date | Apr 28, 2008 |
| Publication date | Sep 8, 2015 |
| Grant date | Sep 8, 2015 |
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Abstract
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Provided is means which enables observation of the shape of a specimen as it is without deforming the specimen. Observation is made by allowing a specimen-holding member having an opening (for example, microgrid and mesh) to hold an ionic liquid and charging a specimen thereto, to allow the specimen to suspend in the ionic liquid. Furthermore, in the proximity of the specimen-holding member, a mechanism of injecting an ionic liquid (ionic liquid introduction mechanism) and/or an electrode are provided. When a voltage is applied to the electrode, the specimen moves or deforms in the ionic liquid. How the specimen moves or deforms can be observed. Furthermore, in the proximity of specimen-holding member, an evaporation apparatus is provided to enable charge of the specimen into the ionic liquid while evaporating. Furthermore, in the proximity of the specimen-holding member, a microcapillary is provided to charge a liquid-state specimen into the ionic liquid. Note that the specimen-holding member is designed to be rotatable.
First claim
Opening claim text (preview).
The invention claimed is: 1. A specimen holder for observing a specimen by a transmission electron microscope, the specimen holder comprising: a holder member having an opening for transmitting an electron beam and for holding, entirely by surface tension, an ionic liquid having the specimen charged therein, wherein the ionic liquid fills the entire opening. 2. The specimen holder according to claim 1 , wherein the holder member is a microgrid or a mesh.…
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Electricity · mapped topic
Electricity · mapped topic
Physics · mapped topic
Electricity · mapped topic
Physics · mapped topic
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Frequently asked questions
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- What does patent US9129772B2 cover?
- Provided is means which enables observation of the shape of a specimen as it is without deforming the specimen. Observation is made by allowing a specimen-holding member having an opening (for example, microgrid and mesh) to hold an ionic liquid and charging a specimen thereto, to allow the specimen to suspend in the ionic liquid. Furthermore, in the proximity of the specimen-holding member, a …
- Who is the assignee on this patent?
- Hitachi High Tech Corp
- What technology area does this patent fall under?
- Primary CPC classification H01J37/20. Mapped technology areas include Electricity.
- When was this patent published?
- Publication date Tue Sep 08 2015 00:00:00 GMT+0000 (Coordinated Universal Time) (B2). Legal status and post-grant events are not shown on this page.
- What related patents are in patentsdb?
- We list 8 related publications on this page (citations in our corpus or others sharing the same primary CPC).