Driving apparatus, exposure apparatus, and method of manufacturing article

Patent metadata

Field	Value
Publication number	US-9124151-B2
Application number	US-201313803389-A
Country	US
Kind code	B2
Filing date	Mar 14, 2013
Priority date	Apr 16, 2012
Publication date	Sep 1, 2015
Grant date	Sep 1, 2015

Abstract

The present invention provides a driving apparatus including an axis member supported on a base, and a movable member movable along the axis member, comprising a plurality of plate members each including a through-hole through which the axis member penetrates and surrounding the axis member, wherein the plurality of plate members are located apart from each other in a moving direction of the movable member.

First claim

What is claimed is:

1. A driving apparatus comprising:
an axis member;
a movable member movable along an axial direction of the axis member and engaged with the axis member; and
a cover unit connected to the movable member and movable together with the movable member, and includes:
a cover member that covers a portion of the axis member;
a plurality of plate members each including a through-hole through which the axis member penetrates,
wherein the plurality of plate membe…

Assignees

• Canon Kk

Inventors

• Morohashi Akira
• Korenaga Nobushige

Classifications

• F16H25/2418

  Mechanical Engineering · mapped topic

• G03B27/581

  Physics · mapped topic

• H02K7/14 Primary

  Electricity · mapped topic

• G03B7/20 Primary

  Physics · mapped topic

• G03F7/70758

  Physics · mapped topic