Semiconductor device and method for forming the same
US-2024395669-A1 · Nov 28, 2024 · US
US9123780B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9123780-B2 |
| Application number | US-201213720346-A |
| Country | US |
| Kind code | B2 |
| Filing date | Dec 19, 2012 |
| Priority date | Dec 19, 2012 |
| Publication date | Sep 1, 2015 |
| Grant date | Sep 1, 2015 |
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A method for making an interconnect element includes depositing a thermally conductive layer on an in-process unit. The in-process unit includes a semiconductor material layer defining a surface and edges surrounding the surface, a plurality of conductive elements, each conductive element having a first portion extending through the semiconductor material layer and a second portion extending from the surface of the semiconductor material layer. Dielectric coatings extend over at least the second portion of each conductive element. The thermally conductive layer is deposited on the in-process unit at a thickness of at least 10 microns so as to overlie a portion of the surface of the semiconductor material layer between the second portions of the conductive elements with the dielectric coatings positioned between the conductive elements and the thermally conductive layer.
Opening claim text (preview).
The invention claimed is: 1. A method for making an interconnect element, comprising: depositing a thermally conductive layer on an in-process unit, the in-process unit including a semiconductor material layer defining a surface and edges surrounding the surface, a plurality of conductive elements, each conductive element having a first portion extending through the semiconductor material layer, a second portion extending from the surface of the semiconductor material layer, and d…
Electricity · mapped topic
Electricity · mapped topic
Electricity · mapped topic
Electricity · mapped topic
Electricity · mapped topic
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