Metamorphic growth of III-V semiconductor on silicon substrate by MOCVD for high speed III-V transistors

US9123741B2 · US · B2

Patent metadata
FieldValue
Publication numberUS-9123741-B2
Application numberUS-201313752971-A
CountryUS
Kind codeB2
Filing dateJan 29, 2013
Priority dateJan 29, 2013
Publication dateSep 1, 2015
Grant dateSep 1, 2015

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Abstract

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A III-V semiconductor device on a silicon substrate is constructed with a silicon (Si) substrate onto which gallium arsenide (GaAs) indium phosphide (InP) and aluminum indium arsenide (AlInAs) to form a structure of AlInAs over InP over GaAs over Si. The GaAs is applied in at least one layer over the Si, followed by at least one layer of InP and at least one layer of AlInAs. A portion of the structure is doped and a cap or passivation layer is applied.

First claim

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What is claimed is: 1. A method for manufacturing a III-V semiconductor device on a silicon substrate, the method comprising: preparing a silicon (Si) substrate; treating the substrate to form a stable As—Si prelayer on the substrate; applying at least one III/V semiconductor layer comprising a layer of gallium arsenide (GaAs) forming a thin strain GaInAs layer; applying at least one layer of a second III/V semiconductor material comprising a layer of indium phosphide (InP…

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What does patent US9123741B2 cover?
A III-V semiconductor device on a silicon substrate is constructed with a silicon (Si) substrate onto which gallium arsenide (GaAs) indium phosphide (InP) and aluminum indium arsenide (AlInAs) to form a structure of AlInAs over InP over GaAs over Si. The GaAs is applied in at least one layer over the Si, followed by at least one layer of InP and at least one layer of AlInAs. A portion of the st…
Who is the assignee on this patent?
Nano & Advanced Materials Inst Ltd
What technology area does this patent fall under?
Primary CPC classification H10D30/015. Mapped technology areas include Electricity.
When was this patent published?
Publication date Tue Sep 01 2015 00:00:00 GMT+0000 (Coordinated Universal Time) (B2). Legal status and post-grant events are not shown on this page.
What related patents are in patentsdb?
We list 8 related publications on this page (citations in our corpus or others sharing the same primary CPC).