High electron mobility transistor and method for forming the same
US-12176414-B2 · Dec 24, 2024 · US
US9123741B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9123741-B2 |
| Application number | US-201313752971-A |
| Country | US |
| Kind code | B2 |
| Filing date | Jan 29, 2013 |
| Priority date | Jan 29, 2013 |
| Publication date | Sep 1, 2015 |
| Grant date | Sep 1, 2015 |
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A III-V semiconductor device on a silicon substrate is constructed with a silicon (Si) substrate onto which gallium arsenide (GaAs) indium phosphide (InP) and aluminum indium arsenide (AlInAs) to form a structure of AlInAs over InP over GaAs over Si. The GaAs is applied in at least one layer over the Si, followed by at least one layer of InP and at least one layer of AlInAs. A portion of the structure is doped and a cap or passivation layer is applied.
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What is claimed is: 1. A method for manufacturing a III-V semiconductor device on a silicon substrate, the method comprising: preparing a silicon (Si) substrate; treating the substrate to form a stable As—Si prelayer on the substrate; applying at least one III/V semiconductor layer comprising a layer of gallium arsenide (GaAs) forming a thin strain GaInAs layer; applying at least one layer of a second III/V semiconductor material comprising a layer of indium phosphide (InP…
Electricity · mapped topic
Electricity · mapped topic
Electricity · mapped topic
Electricity · mapped topic
Electricity · mapped topic
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