Semiconductor device and method for forming the same
US-2015001604-A1 · Jan 1, 2015 · US
US9123736B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9123736-B2 |
| Application number | US-201414564761-A |
| Country | US |
| Kind code | B2 |
| Filing date | Dec 9, 2014 |
| Priority date | Aug 30, 2011 |
| Publication date | Sep 1, 2015 |
| Grant date | Sep 1, 2015 |
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The semiconductor device includes a semiconductor substrate having a cell region and a peripheral circuit region defined therein, semiconductor memory elements formed over the semiconductor substrate in the cell region, an interlayer insulating layer formed over the semiconductor substrate in the peripheral circuit region, first conductive layers substantially vertically passing through the interlayer insulating layer, and arranged in a matrix, and second conductive layers coupling the first conductive layers in rows or columns, each pair of the second conductive layers and the first conductive layers coupled to the each pair of the second conductive layers, respectively, forming electrodes of a capacitor.
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What is claimed is: 1. A method of manufacturing a semiconductor device, the method comprising: providing a semiconductor substrate having a cell region and a peripheral circuit region defined therein; forming gate lines spaced apart from each other over the semiconductor substrate in the cell region; forming an interlayer insulating layer over the semiconductor substrate to cover the entirety of the gate lines; forming first contact holes spaced apart from each other in the…
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