Positioning system, lithographic apparatus and device manufacturing method

Patent metadata

Field	Value
Publication number	US-9122173-B2
Application number	US-201213398890-A
Country	US
Kind code	B2
Filing date	Feb 17, 2012
Priority date	Apr 14, 2008
Publication date	Sep 1, 2015
Grant date	Sep 1, 2015

Abstract

A positioning system to position a table within a base frame of a lithographic apparatus, the positioning system including first and second actuators and a controller. The first actuator exerting an actuation force on the table. The first actuator being connected to a balance mass constructed and arranged to absorb a reaction force of the first actuator. The controller and second actuator constructed and arranged to exert a compensation force and/or torque to compensate a torque caused by the actuation force exerted by the first actuator on the balance mass.

First claim

What is claimed is:

1. A method for positioning at least one of a first support configured to support a patterning device and a second support configured to hold a substrate in a lithographic apparatus, the patterning device being capable of imparting a radiation beam with a pattern in its cross-section to form a patterned beam on the substrate, the method comprising:
exerting an actuation force, using a first actuator, on the at least one of first and second supports;
absorbing a reaction force resulting from the actuation force with a balance mass; and
exerting a compensation force, using a second actuator, to compensate a torque caused by the actuation force on the balance mass.

2. The method according to claim 1 , wherein the torque is caused by a difference in position of a center of mass of the balance mass and the at least one of first and second supports on which the actuation force is being exerted.

3. The method according to claim 2 , wherein the center of mass of the balance mass and the at least one of first and second supports on which the actuation force is being exerted have a difference in position in a first direction; and the actuation force is exerted in a direction perpendicular to the first direction.

4. The method according to claim 3 , wherein the first direction is substantially parallel to a vertical plane or gravity and the direction perpendicular to the first direction is substantially in a horizontal plane.

5. The method according to claim 1 , wherein exerting an actuation force on the at least one of first and second supports includes:
exerting the actuation force with a planar motor that includes a magnet plate and a coil.

6. The method according to claim 5 , wherein the magnet plate is coupled to the balance mass and the coil is coupled to the at least one of first and second supports on which the actuation force is being exerted.

7. The method according to claim 1 , further comprising:
providing a base frame configured to moveably support a table, the balance mass, and the first actuator that is configured to exert the actuation force.

8. The method according to claim 1 , wherein exerting a compensation force includes:
exerting the compensation force on another balance mass.

9. The method according to claim 8 , wherein the second actuator is configured to exert the compensation force between a base frame and a surface that supports the base frame, wherein the base frame is configured to moveably support the balance mass and the first actuator that is configured to exert the actuation force.

10. The method according to claim 8 , further comprising:
actuating the another balance mass in a rotational direction by the second actuator to exert the compensation force.

11. The method according to claim 8 , wherein the another balance mass is moveably suspended from a base frame; and the second actuator is configured to exert the compensation force between the another balance mass and the base frame.

12. The method according to claim 8 , wherein the another balance mass is moveably suspended from the balance mass.

13. The method according to claim 1 , further comprising:
receiving a signal representative of the actuation force; and
calculating the compensation force based on the actuation force.

14. The method according to claim 1 , further comprising:
calculating the compensation force based on a position and direction of the actuation force and a position and direction of the compensation force.

15. A method for positioning a support in a lithographic apparatus, the method comprising:
exerting a first force, using a first actuator, between a balance mass and the support, the first force moving the support relative to the balance mass; and
controllably exerting a second force, using a second actuator, to compensate a torque caused by a difference in position of a center of mass of the balance mass and the support.

16. The method according to claim 15 , wherein the second force is exerted on an another balance mass.

Assignees

• Butler Hans
• Cuijpers Martinus Agnes Willem
• Hoogendam Christiaan Alexander
• De Jongh Robertus Johannes Marinus
• Renkens Michael Jozef Mathijs
• Van Der Wijst Marc Wilhelmus Maria
• Wijckmans Maurice Willem Jozef Etiënne
• Tousain Robertus Leonardus
• Faassen Ronald Petrus Hendricus
• Koevoets Adrianus Hendrik
• Asml Netherlands Bv

Inventors

• Butler Hans
• Cuijpers Martinus Agnes Willem
• Hoogendam Christiaan Alexander
• De Jongh Robertus Johannes Marinus
• Renkens Michael Jozef Mathijs
• Van Der Wijst Marc Wilhelmus Maria
• Wijckmans Maurice Willem Jozef Etiënne
• Tousain Robertus Leonardus
• Faassen Ronald Petrus Hendricus
• Koevoets Adrianus Hendrik

Classifications

• G03F7/709 Primary

  Vibration, e.g. vibration detection, compensation, suppression or isolation · CPC title

• G03F7/70758

  Drive means, e.g. actuators, motors for long- or short-stroke modules or fine or coarse driving · CPC title

• G03F7/70766

  Reaction force control means, e.g. countermass · CPC title