High temperature biasable heater with advanced far edge electrode, electrostatic chuck, and embedded ground electrode
US-2024412957-A1 · Dec 12, 2024 · US
US9116202B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9116202-B2 |
| Application number | US-201314099455-A |
| Country | US |
| Kind code | B2 |
| Filing date | Dec 6, 2013 |
| Priority date | Feb 10, 2010 |
| Publication date | Aug 25, 2015 |
| Grant date | Aug 25, 2015 |
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In an embodiment, a chuck to support a solar cell in hot spot testing is provided. This embodiment of the chuck comprises a base portion and a support portion disposed above the base portion. The support portion is configured to support the solar cell above the base portion and to define a cavity between a bottom surface of the solar cell and the base portion that thermally separates a portion of the bottom surface of the solar cell from the base portion.
Opening claim text (preview).
What is claimed is: 1. A chuck to support a substrate for electrical or thermal testing, the chuck comprising: a base portion; a support portion disposed above, and coupled to, the base portion, the support portion to support a substrate above the base portion and to define a cavity between a bottom surface of the substrate and the base portion that thermally separates a portion of the bottom surface of the substrate from the base portion; and a bore through the base portion a…
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