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US-9219068-B2 · Dec 22, 2015 · US
Method for improving anti-radiation performance of SOI structure
US9111995B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9111995-B2 |
| Application number | US-201214364984-A |
| Country | US |
| Kind code | B2 |
| Filing date | Oct 25, 2012 |
| Priority date | Dec 14, 2011 |
| Publication date | Aug 18, 2015 |
| Grant date | Aug 18, 2015 |
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Abstract
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A method for improving anti-radiation performance of SOI structure that includes implementing particle implantations of high-energy neutrons, protons and γ-rays to a buried oxide layer of an SOI structure, and then performing annealing process. The high-energy particle implantation introduces displacement damage to the buried oxide layer of the SOI structure.
First claim
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What is claimed is: 1. A method for improving anti-radiation performance of an SOI structure comprising following steps: a) implementing high-energy particle implantation to a buried oxide layer of the SOI structure and then performing annealing process; wherein the high-energy particle implantation introduces displacement damage to the buried oxide layer of the SOI structure. 2. The method of claim 1 , wherein the step of implementing high-energy particle…
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Electricity · mapped topic
Electricity · mapped topic
Electricity · mapped topic
Electricity · mapped topic
Electricity · mapped topic
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- What does patent US9111995B2 cover?
- A method for improving anti-radiation performance of SOI structure that includes implementing particle implantations of high-energy neutrons, protons and γ-rays to a buried oxide layer of an SOI structure, and then performing annealing process. The high-energy particle implantation introduces displacement damage to the buried oxide layer of the SOI structure.
- Who is the assignee on this patent?
- Inst Of Microelectronics Cas
- What technology area does this patent fall under?
- Primary CPC classification H10P90/1908. Mapped technology areas include Electricity.
- When was this patent published?
- Publication date Tue Aug 18 2015 00:00:00 GMT+0000 (Coordinated Universal Time) (B2). Legal status and post-grant events are not shown on this page.
- What related patents are in patentsdb?
- We list 8 related publications on this page (citations in our corpus or others sharing the same primary CPC).