Elastic retention wheels and wafer adapter containing the same wheels

Patent metadata

Field	Value
Publication number	US-9111973-B2
Application number	US-201213622869-A
Country	US
Kind code	B2
Filing date	Sep 19, 2012
Priority date	Sep 29, 2011
Publication date	Aug 18, 2015
Grant date	Aug 18, 2015

Abstract

An elastic retention wheel and a wafer adapter containing this wheel are disclosed. The elastic retention wheel comprises: a rim; a retention main body positioned within the rim; and a plurality of spokes. Each spoke is positioned in a space between the rim and the retention main body. One end of each spoke is coupled to the retention main body, and the other end is coupled to the rim. A sliding rail can be provided on an inner side of the rim, and the spoke's other end can slide with the sliding rail. When the elastic retention wheel is stressed by a non-uniform or excessive external force, these spokes provide enhanced support from the rim's inner side, or at least partially disperse the non-uniform external force applied to the elastic retention wheel. Thereby, the elastic retention wheel is largely kept from over-deformation or cracking.

First claim

What is claimed is:

1. An elastic retention wheel adapted for use in a wafer adapter, the elastic retention wheel comprising:
a rim;
a retention main body, the retention main body being positioned within the rim and integrally formed with the rim, the retention main body and at least a portion of the rim being separated from each other by a space; and
a plurality of spokes, each spoke positioned within the space, each spoke further having a first end coupled to the retention m…

Assignees

• Semiconductor Mfg Int Shanghai
• Semiconductor Mfg Int Beijing
• Semiconductor Mfg Int Corp
• Semiconductor Mfg Int Corp

Inventors

• Zhao Yujie

Classifications

• H10P72/1922

  Electricity · mapped topic

• H10P72/1921 Primary

  Electricity · mapped topic

• H01L21/67383 Primary

  Electricity · mapped topic

• H01L21/67386

  Electricity · mapped topic