Graphene transfer method

Patent metadata

Field	Value
Publication number	US-9111667-B2
Application number	US-201214348128-A
Country	US
Kind code	B2
Filing date	Sep 21, 2012
Priority date	Sep 29, 2011
Publication date	Aug 18, 2015
Grant date	Aug 18, 2015

Abstract

A graphene transfer method comprising: attaching a first end of a first stacked structure, including a catalyst metal, graphene, and a supporting body stacked in the order stated, to a point of a target film that is transported in a roll-to-roll manner in a first direction; forming a second stacked structure by removing the catalyst metal of the first stacked structure, the second stacked structure having a surface whereon the graphene is exposed; and transferring the exposed graphene to a transfer surface of the target film by transporting the target film in a roll-to-roll manner and the second stacked structure in the first direction.

First claim

The invention claimed is:

1. A graphene transfer method comprising:
attaching a first end of a first stacked structure, including a catalyst metal, graphene, and a supporting body stacked in the order stated, to a point of a target film that is transported in a roll-to-roll manner in a first direction;
forming a second stacked structure by removing the catalyst metal of the first stacked structure, the second stacked structure having a surface whereon the graphene is exposed; and
transferring the exposed graphene to a transfer surface of the target film by transporting the target film in a roll-to-roll manner and the second stacked structure in the first direction,
wherein the catalyst metal is removed via a wet-etching process by floating the first stacked structure at surface level in a catalyst metal removing liquid, and
wherein the method further comprises:
after the transferring of the graphene, transporting the target film in a roll-to-roll manner and the second stacked structure in a direction opposite to the first direction and cleaning the graphene transferred to the target film by floating the graphene on the surface of a cleaning liquid; and
transferring the cleaned graphene back to the transfer surface of the target film by transporting the target film in a roll-to-roll manner and the second stacked structure in the first direction.

2. The graphene transfer method of claim 1 , wherein the wet-etching process is performed by using at least one from among hydrogen fluoride (HF), iron chloride (FeCl 3 ), iron nitride (Fe(No 3 ) 3 ), copper chloride (CuCl 2 ), ammonium persulfate ((NH 4 ) 2 S 2 O 8 ), sodium persulfate (Na 2 S 2 O 8 ) solution, and a hydrogen peroxide/sulfuric acid type solution.

3. The graphene transfer method of claim 1 , wherein a container is filled with the catalyst metal removing liquid after the catalyst metal is removed, and
the catalyst metal removing liquid is discharged from the container and the container is filled with the cleaning liquid before the cleaning of the graphene.

4. The graphene transfer method of claim 3 , wherein roll-to-roll equipment for transporting the target film in a roll-to-roll manner is arranged inside or outside the container.

5. The graphene transfer method of claim 1 , wherein the supporting body is formed of at least one from among polymers including polymethylmethacrylate (PMMA), polyamide (PA), poly(butylenes terephtalate) (PBT), polycarbonate (PC), polyethylene (PE), poly(oxymethylene) (POM), polypropylene (PP), poly(phenylenether) (PPE), polystylene (PS), polysulfone (PSU), liquid crystal polymer (LCP), poly(etheretherketone) (PEEK), poly(etherimide) (PEI), polylactide (PLA), poly(dimethylsiloxane) (PDMS), and cycloolefin copolymer (COC).

6. The graphene transfer method of claim 1 , wherein, further comprising:
after the transferring of the graphene, removing the supporting body by using a supporting body removing liquid.

7. The graphene transfer method of claim 1 , wherein the catalyst metal comprises at least one selected from among nickel (Ni), cobalt (Co), iron (Fe), platinum (Pt), gold (Au), aluminum (Al), chrome (Cr), copper (Cu), magnesium (Mg), manganese (Mn), rhodium (Rh), silicon (Si), tantalum (Ta), titanium (Ti), tungsten (W), uranium (U), vanadium (V), zirconium (Zr), and combinations thereof.

8. The graphene transfer method of claim 1 , wherein the target film contains at least one from among polyethylene terephthalate (PET), polyimide (PI), polydimethylsiloxane (PDMS), plastic, synthetic rubber, and natural rubber.

Assignees

• Samsung Techwin Co Ltd

Inventors

• Kim Na-Young

Classifications

• B41M5/10

  by using carbon paper or the like · CPC title

• B41M3/00 Primary

  Printing processes to produce particular kinds of printed work, e.g. patterns ({printing apparatus or machines of special type or for particular purposes B41F17/00;} special designs or pictures per se B44F; manufacturing printed circuits using printing techniques H05K3/12 {; manufacturing organic semiconductor devices using printing techniques H10K71/13}) · CPC title

• B82Y40/00

  Manufacture or treatment of nanostructures · CPC title

• C01B32/194

  After-treatment · CPC title

• C01B32/05

  Preparation or purification of carbon not covered by groups C01B32/15, C01B32/20, C01B32/25, C01B32/30 · CPC title