Electric field sensor, system, and method for programming electronic devices on a wafer
US-2016306007-A1 · Oct 20, 2016 · US
Potential measuring device
US9110109B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9110109-B2 |
| Application number | US-201313867421-A |
| Country | US |
| Kind code | B2 |
| Filing date | Apr 22, 2013 |
| Priority date | Apr 23, 2012 |
| Publication date | Aug 18, 2015 |
| Grant date | Aug 18, 2015 |
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Abstract
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A potential measuring device which measures a charged object in a non-contact manner with a sensor may include a first shutter having a first shutter part, which is provided with a first opening which can be positioned at a position opposing the sensor, and leaf spring parts extending from both ends thereof; a second shutter having a second shutter part, which is provided with a second opening which can be positioned at a position opposing the sensor and the first opening, and leaf spring parts extending from both ends thereof; a coil provided so that a direction along a center axis opposes portions of the leaf spring parts; and a magnet provided on each of regions opposing both end sides of the coil in the leaf spring parts extending from the both ends of each of the first shutter part and the second shutter part.
First claim
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What is claimed is: 1. A potential measuring device which measures a surface potential of a charged object in a non-contact manner with a sensor disposed to oppose the charged object, the device comprising: a first shutter having a first shutter part, which is disposed between the charged object and the sensor and has a first opening, and leaf spring parts extending from both ends of the first shutter part; a second shutter having a second shutter part, which is disposed between…
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- What does patent US9110109B2 cover?
- A potential measuring device which measures a charged object in a non-contact manner with a sensor may include a first shutter having a first shutter part, which is provided with a first opening which can be positioned at a position opposing the sensor, and leaf spring parts extending from both ends thereof; a second shutter having a second shutter part, which is provided with a second opening …
- Who is the assignee on this patent?
- Koganei Ltd
- What technology area does this patent fall under?
- Primary CPC classification G01R29/12. Mapped technology areas include Physics.
- When was this patent published?
- Publication date Tue Aug 18 2015 00:00:00 GMT+0000 (Coordinated Universal Time) (B2). Legal status and post-grant events are not shown on this page.
- What related patents are in patentsdb?
- We list 8 related publications on this page (citations in our corpus or others sharing the same primary CPC).