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Phase difference detector, phase difference detection program, and plasma processing system using the phase difference detector
US9110106B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9110106-B2 |
| Application number | US-201313904514-A |
| Country | US |
| Kind code | B2 |
| Filing date | May 29, 2013 |
| Priority date | Jun 4, 2012 |
| Publication date | Aug 18, 2015 |
| Grant date | Aug 18, 2015 |
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Abstract
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A phase difference detector detects the phase difference between two AC signals at a high speed and with high accuracy. A phase difference computation unit computes the phase difference φ r (=φ 2 −φ 1 ) between two detected voltages v 1 (phase angle: φ 1 ) and v 2 (phase angle: φ 2 ). The phase difference computation unit uses a sine wave v s and a cosine wave v c generated separately and having the same frequency as the fundamental frequency of the voltages v 1 and v 2 , to perform computation of v 2s =v 2 ×v s , v 2c =v 2 ×v c , v 1s =v 1 ×v s , v 1c =v 1 ×v c , and then extracts DC components I 2 =(−A 2 /2)·sin(φ 2 ), R 2 =(A 2 /2)·cos(φ 2 ), I 1 =(−A 1 /2)·sin(φ 1 ), R 1 =(A 1 /2)·cos(φ 1 ) at low-pass filters. The phase difference computation unit computes R 3 =R 1 ×R 2 +I 1 ×I 2 at a complex multiplying unit to obtain R 3 =(A 1 ·A 2 /4)·cos(φ r ), computes I 3 =R 2 ×I 1 −R 1 ×I 2 to obtain I 3 =(A 1 ·A 2 /4)·sin(φ r ), and computes φ r =tan −1 (I 3 /R 3 ) at the arctangent calculation unit, thereby obtaining the phase difference φ r .
First claim
Opening claim text (preview).
The invention claimed is: 1. A phase difference detector for detecting a phase difference between a first AC signal and a second AC signal having a same frequency as a fundamental frequency of the first AC signal, the detector comprising: a sine wave generator that generates a sine wave signal having the same frequency as the fundamental frequency; a cosine wave generator that generates a cosine wave signal having the same frequency as the fundamental frequency; a first signal…
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Electricity · mapped topic
- G01R25/00Primary
Physics · mapped topic
Electricity · mapped topic
Electricity · mapped topic
Electricity · mapped topic
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- What does patent US9110106B2 cover?
- A phase difference detector detects the phase difference between two AC signals at a high speed and with high accuracy. A phase difference computation unit computes the phase difference φ r (=φ 2 −φ 1 ) between two detected voltages v 1 (phase angle: φ 1 ) and v 2 (phase angle: φ 2 ). The phase difference computation unit uses a sine wave v s and a cosine wave v c generated separately and h…
- Who is the assignee on this patent?
- Daihen Corp
- What technology area does this patent fall under?
- Primary CPC classification G01R25/00. Mapped technology areas include Physics.
- When was this patent published?
- Publication date Tue Aug 18 2015 00:00:00 GMT+0000 (Coordinated Universal Time) (B2). Legal status and post-grant events are not shown on this page.
- What related patents are in patentsdb?
- We list 8 related publications on this page (citations in our corpus or others sharing the same primary CPC).