Particle detecting device and particle detecting method

Patent metadata

Field	Value
Publication number	US-9109987-B2
Application number	US-201414562999-A
Country	US
Kind code	B2
Filing date	Dec 8, 2014
Priority date	Dec 10, 2013
Publication date	Aug 18, 2015
Grant date	Aug 18, 2015

Abstract

A particle detecting device includes: a fluorescence measuring instrument that measures light in a fluorescent band, which is produced in a region that is illuminated by an excitation beam from a light source; and an evaluating portion that evaluates whether the light measured by the fluorescence measuring instrument includes Raman-scattered light and florescent light, to evaluate that a fluorescent particle is included in the fluid if the evaluation is that the measured light includes florescent light, and to evaluate that the fluid does not include a fluorescent particle if the evaluation is that the measured light does not include fluorescent light, to evaluate that moisture is included in the fluid if there is an evaluation that the measured light includes Raman scattered light, and to evaluate that the fluid does not include moisture if there is an evaluation that the measured light does not include Raman scattered light.

First claim

The invention claimed is:

1. A particle detecting device comprising:
a light source that illuminates a fluid with an excitation beam;
a fluorescence measuring instrument that measures light in a fluorescent band, which is produced in a region that is illuminated by the excitation beam; and
an evaluating portion that evaluates whether or not the light that is measured by the fluorescence measuring instrument includes Raman-scattered light and florescent light, to evaluate that…

Assignees

• Azbil Corp

Inventors

• Kinugasa Seiichiro

Classifications

• G01N2021/6417

  Physics · mapped topic

• G01J3/44

  Physics · mapped topic

• G01N15/0211 Primary

  Physics · mapped topic

• G01J3/4406

  Physics · mapped topic

• G01N15/1459

  Physics · mapped topic