Monitoring oscillating components
US-2016363498-A1 · Dec 15, 2016 · US
Pressure detection device and polishing apparatus
US9109964B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9109964-B2 |
| Application number | US-201213446241-A |
| Country | US |
| Kind code | B2 |
| Filing date | Apr 13, 2012 |
| Priority date | Sep 30, 2011 |
| Publication date | Aug 18, 2015 |
| Grant date | Aug 18, 2015 |
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Abstract
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A pressure detection device includes a pressure detector, a bearing member, at least two guiding rods passing through the bearing member and connecting with the pressure detector, at least two elastic elements sleeving on the at least one guiding rod and resisting between the bearing member and the pressure detector for transferring forces from the bearing member to the pressure detector.
First claim
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What is claimed is: 1. A pressure detection device, comprising: a pressure detector; a force transfer member connected with the pressure detector; a bearing member; at least two guiding rods passing through the bearing member and the force transfer member; and at least two elastic elements sleeving on the at least two guiding rods correspondingly and being located between the bearing member and the force transfer member for transferring forces to the pressure detector; w…
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- G01L5/0076Primary
Physics · mapped topic
Operations & Transport · mapped topic
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- What does patent US9109964B2 cover?
- A pressure detection device includes a pressure detector, a bearing member, at least two guiding rods passing through the bearing member and connecting with the pressure detector, at least two elastic elements sleeving on the at least one guiding rod and resisting between the bearing member and the pressure detector for transferring forces from the bearing member to the pressure detector.
- Who is the assignee on this patent?
- Bao Yan-Cheng, Tang ai-jun, Zhang Cheng, and 2 more
- What technology area does this patent fall under?
- Primary CPC classification G01L5/0076. Mapped technology areas include Physics.
- When was this patent published?
- Publication date Tue Aug 18 2015 00:00:00 GMT+0000 (Coordinated Universal Time) (B2). Legal status and post-grant events are not shown on this page.
- What related patents are in patentsdb?
- We list 8 related publications on this page (citations in our corpus or others sharing the same primary CPC).