Micro-electro-mechanical device with compensation of errors due to disturbance forces, such as quadrature components
US-2015377624-A1 · Dec 31, 2015 · US
Micro-gyroscope and method for operating a micro-gyroscope
US9109893B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9109893-B2 |
| Application number | US-201213720262-A |
| Country | US |
| Kind code | B2 |
| Filing date | Dec 19, 2012 |
| Priority date | Dec 23, 2011 |
| Publication date | Aug 18, 2015 |
| Grant date | Aug 18, 2015 |
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Abstract
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A micro-gyroscope for determining a rate of rotation about a Z-axis includes a substrate and two sensor devices each of which comprises at least one drive mass, at least one anchor, drive elements, at least one sensor mass and sensor elements. The drive mass is mounted linearly displaceably in the direction of an X-axis, and can be driven in an oscillatory manner with respect to the X-axis. The sensor mass is coupled to the drive mass by means of springs. The sensor mass is displaceable in the Y-direction, and sensor elements detects a deflection of the sensor mass in the Y-axis. The two sensor devices are disposed parallel to each other and one above the other in the direction of the Z-axis, and the drive mass in these two sensor devices are coupled to each other by means of a coupling spring.
First claim
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I claim: 1. A micro-gyroscope for determining a rate of rotation about a Z-axis, comprising: a substrate, and a first and a second sensor device, wherein each sensor device further comprises: at least one drive mass disposed parallel to the substrate, at least one anchor by means of which the at least one drive mass is attached to the substrate, at least one anchor spring disposed between the at least one anchor and the at least one drive mass, by means of which the at lea…
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- G01C19/5747Primary
Physics · mapped topic
- G01C19/56Primary
Physics · mapped topic
- G01C19/5712Primary
Physics · mapped topic
Physics · mapped topic
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- What does patent US9109893B2 cover?
- A micro-gyroscope for determining a rate of rotation about a Z-axis includes a substrate and two sensor devices each of which comprises at least one drive mass, at least one anchor, drive elements, at least one sensor mass and sensor elements. The drive mass is mounted linearly displaceably in the direction of an X-axis, and can be driven in an oscillatory manner with respect to the X-axis. The…
- Who is the assignee on this patent?
- Maxim Integrated Products
- What technology area does this patent fall under?
- Primary CPC classification G01C19/5747. Mapped technology areas include Physics.
- When was this patent published?
- Publication date Tue Aug 18 2015 00:00:00 GMT+0000 (Coordinated Universal Time) (B2). Legal status and post-grant events are not shown on this page.
- What related patents are in patentsdb?
- We list 8 related publications on this page (citations in our corpus or others sharing the same primary CPC).