METHODS TO IMPROVE THE CRYSTALLINITY OF PbZrTiO3 AND Pt FILMS FOR MEMS APPLICATIONS
US-2015380635-A1 · Dec 31, 2015 · US
Hard laminar coating
US9109280B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9109280-B2 |
| Application number | US-201113982860-A |
| Country | US |
| Kind code | B2 |
| Filing date | Feb 1, 2011 |
| Priority date | Feb 1, 2011 |
| Publication date | Aug 18, 2015 |
| Grant date | Aug 18, 2015 |
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Abstract
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A hard laminar coating having a first 61 m and a second film having respective different compositions and alternately laminated on a surface of a base structure, wherein the first film is a carbide, a nitride, a carboxide, a nitroxide, a carbonitride or a carbo-oxynitride of (Al a Cr b B c ), while the second film is TiB 2 , the hard laminar coating configured to include atomic ratios a, b and c in the first film satisfying a=1−b−c, 0.2≦b≦0.7, and 0<c≦0.2, and a thickness of the first film being no less than 0.1 μm and no more than 5.0 μm, while a thickness of the second film being no less than 0.1 μm and no more than 5.0 μm, and to have a total thickness of no less than 0.2 μm and no more than 10.0 μm, and the hard laminar.
First claim
Opening claim text (preview).
The invention claimed is: 1. A hard laminar coating consisting of a plurality of films including two kinds of films in the form of a first film and a second film having respective different compositions and alternately laminated on a surface of a base structure, wherein said first film is a carbide, a nitride, a carboxide, a nitroxide, a carbonitride or a carbo-oxynitride of (Al a Cr b B C ), while said second film is TiB 2 , said hard laminar coating configured to include atomic…
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Chemistry & Metallurgy · mapped topic
Cross-Sectional Technologies · mapped topic
- C23C14/06Primary
Chemistry & Metallurgy · mapped topic
Chemistry & Metallurgy · mapped topic
Chemistry & Metallurgy · mapped topic
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- What does patent US9109280B2 cover?
- A hard laminar coating having a first 61 m and a second film having respective different compositions and alternately laminated on a surface of a base structure, wherein the first film is a carbide, a nitride, a carboxide, a nitroxide, a carbonitride or a carbo-oxynitride of (Al a Cr b B c ), while the second film is TiB 2 , the hard laminar coating configured to include atomic ratios a, b and …
- Who is the assignee on this patent?
- Sakurai Masatoshi, OHCHI Toshihiro, Osg Corp
- What technology area does this patent fall under?
- Primary CPC classification C23C14/06. Mapped technology areas include Chemistry & Metallurgy.
- When was this patent published?
- Publication date Tue Aug 18 2015 00:00:00 GMT+0000 (Coordinated Universal Time) (B2). Legal status and post-grant events are not shown on this page.
- What related patents are in patentsdb?
- We list 8 related publications on this page (citations in our corpus or others sharing the same primary CPC).