Mems structure and method for detecting a change in a parameter
US-2019346314-A1 · Nov 14, 2019 · US
US9108314B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9108314-B2 |
| Application number | US-201414206585-A |
| Country | US |
| Kind code | B2 |
| Filing date | Mar 12, 2014 |
| Priority date | Mar 6, 2008 |
| Publication date | Aug 18, 2015 |
| Grant date | Aug 18, 2015 |
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A lithographically structured device has an actuation layer and a control layer operatively connected to the actuation layer. The actuation layer includes a stress layer and a neutral layer that is constructed of materials and with a structure such that it stores torsional energy upon being constructed. The control layer is constructed to maintain the actuation layer substantially in a first configuration in a local environmental condition and is responsive to a change in the local environmental condition such that it permits a release of stored torsional energy to cause a change in a structural configuration of the lithographically structured device to a second configuration, the control layer thereby providing a trigger mechanism. The lithographically structured device has a maximum dimension that is less than about 10 mm when it is in the second configuration.
Opening claim text (preview).
We claim: 1. A method of encapsulating or gripping a sub-millimeter size object, comprising: disposing a lithographically structured device proximate said sub-millimeter size object, said lithographically structured device having a first structural configuration; storing torsional energy in said lithographically structured device in said first structural configuration; and changing an environmental condition proximate said lithographically structured device to release said tor…
Operations & Transport · mapped topic
Operations & Transport · mapped topic
Operations & Transport · mapped topic
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