Showerhead assembly and substrate processing apparatus
US-2024042463-A1 · Feb 8, 2024 · US
US9108214B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9108214-B2 |
| Application number | US-201314068946-A |
| Country | US |
| Kind code | B2 |
| Filing date | Oct 31, 2013 |
| Priority date | Oct 31, 2013 |
| Publication date | Aug 18, 2015 |
| Grant date | Aug 18, 2015 |
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A dispensing module and method of dispensing an adhesive includes a dispenser body having a valve element and a nozzle. The nozzle includes a nozzle member, a sealing zone, and a valve seat. The nozzle member includes a liquid passageway having a bore, a cylindrical surface, a second converging surface, and a shoulder. The sealing zone is defined by the cylindrical surface and extends from the bore toward the shoulder and engages the valve element to close a first volume of the liquid passageway from the inlet. The valve seat is defined by the shoulder and the second converging surface and has a circular line of contact that engages the valve element to close a second volume of the liquid passageway from the inlet. The first volume reduces to the second volume as the valve element moves distally along the sealing zone for discharging the adhesive.
Opening claim text (preview).
What is claimed is: 1. A dispensing module having a sealing zone for dispensing an adhesive, comprising; a dispenser body having a liquid supply passage and a valve element, the valve element including a first valve surface and a second valve surface and being movable from a proximal position to a distal position; and a nozzle connected to the dispenser body, the nozzle comprising: a nozzle member including an inlet, an outlet, and a liquid passageway extending from the inlet t…
Operations & Transport · mapped topic
Operations & Transport · mapped topic
Operations & Transport · mapped topic
Operations & Transport · mapped topic
Operations & Transport · mapped topic
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