Method for forming a patterned layer on a substrate

US9105867B2 · US · B2

Patent metadata
FieldValue
Publication numberUS-9105867-B2
Application numberUS-66683808-A
CountryUS
Kind codeB2
Filing dateJun 30, 2008
Priority dateJul 4, 2007
Publication dateAug 11, 2015
Grant dateAug 11, 2015

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  1. Title

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  2. Abstract

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  3. Assignees and inventors

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  4. Key dates

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  5. First independent claim

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  7. Citations and related patents

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Abstract

Official abstract text for this publication.

This invention relates to a method for forming a patterned layer on a substrate by means of an imprint process. According to the method a first layer is provided on the substrate, and a pattern of recesses is provided in the first layer by imprinting the layer with a patterning means. Then the first layer is cured. The curing is followed by performing a first surface treatment onto the first layer to make the surface of thereof hydrophilic, and then performing a second surface treatment onto a selected subarea of the surface of the first layer to make the. subarea hydrophobic. The subarea includes surface portions between the recesses and excludes the recesses. Finally, a conducting pattern material ( 41 ) is deposited into the recesses.

First claim

Opening claim text (preview).

The invention claimed is: 1. A method for forming a patterned layer on a substrate by means of an imprint process comprising the steps of: providing a single patterning means; providing a first layer on a surface of said substrate; simultaneously forming patterns of recesses in the first layer by imprinting said first layer with said patterning means, wherein said patterns of recesses includes a first pattern of recesses and a second pattern of recesses that are wider than sai…

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What does patent US9105867B2 cover?
This invention relates to a method for forming a patterned layer on a substrate by means of an imprint process. According to the method a first layer is provided on the substrate, and a pattern of recesses is provided in the first layer by imprinting the layer with a patterning means. Then the first layer is cured. The curing is followed by performing a first surface treatment onto the first la…
Who is the assignee on this patent?
Verschuuren Marcus Antonius, Lifka Herbert, Tanase Cristina, and 1 more
What technology area does this patent fall under?
Primary CPC classification H10K71/00. Mapped technology areas include Electricity.
When was this patent published?
Publication date Tue Aug 11 2015 00:00:00 GMT+0000 (Coordinated Universal Time) (B2). Legal status and post-grant events are not shown on this page.
What related patents are in patentsdb?
We list 8 related publications on this page (citations in our corpus or others sharing the same primary CPC).