Vertical-transport field-effect transistor with backside gate contact
US-2024105610-A1 · Mar 28, 2024 · US
US9105840B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9105840-B2 |
| Application number | US-201414199915-A |
| Country | US |
| Kind code | B2 |
| Filing date | Mar 6, 2014 |
| Priority date | Sep 25, 2013 |
| Publication date | Aug 11, 2015 |
| Grant date | Aug 11, 2015 |
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According to embodiments, a semiconductor memory may include: a variable resistance pattern disposed over a substrate and extended in a first direction; first and second structures including a plurality of interlayer dielectric layers and a plurality of conductive layers which are alternately stacked over the substrate, and contacted with one side surface and the other side surface of the variable resistance pattern, respectively, wherein the first stacked structure has a line shape extended in a first direction and the second stacked structure has a pillar shape; and a pillar-shaped conductive pattern contacted with one side surface of the second stacked structure, which is not contacted with the variable resistance pattern.
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What is claimed is: 1. An electronic device comprising a semiconductor memory, wherein the semiconductor memory comprises: a variable resistance pattern disposed over a substrate and extending in a first direction, the variable resistance pattern having a first side surface and a second side surface opposite to the first side surface in a second direction that crosses the first direction; a first structure comprising a plurality of interlayer dielectric layers and a plurality…
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