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US9105834B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9105834-B2 |
| Application number | US-201213360243-A |
| Country | US |
| Kind code | B2 |
| Filing date | Jan 27, 2012 |
| Priority date | Jan 27, 2012 |
| Publication date | Aug 11, 2015 |
| Grant date | Aug 11, 2015 |
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A piezoelectric actuated device includes one or more areas of piezoelectric material coupled to a substrate. The piezoelectric material may be placed on regions of the substrate that exhibit the greatest curvature and stress when the device is vibrating according to a desired structural Eigenmode of vibration. The piezoelectric material may have a non-uniform density.
Opening claim text (preview).
What is claimed is: 1. A piezoelectric actuated device comprising: a frame; a platform that can take on different angular displacements relative to the frame; at least one flexure coupling the platform to the frame; and piezoelectric material mechanically coupled to at least a portion of the frame, wherein the piezoelectric material has a non-uniform area density, wherein the device exhibits a desired structural Eigenmode of vibration that results in stress on the frame, and…
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