Capacitive micro-machined transducer and method of manufacturing the same
US-9231496-B2 · Jan 5, 2016 · US
US9105800B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9105800-B2 |
| Application number | US-201314100048-A |
| Country | US |
| Kind code | B2 |
| Filing date | Dec 9, 2013 |
| Priority date | Dec 9, 2013 |
| Publication date | Aug 11, 2015 |
| Grant date | Aug 11, 2015 |
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A method for forming a coating of material on selected portions of a surface of a substrate having a plurality of cavities, each cavity having outer, peripheral sidewalls extending outwardly from the surface. The method includes: providing a structure having a release agent thereon; contacting top surface of the wafer with the release agent to transfer portions of the release agent to the top surface of the wafer while bottom portions of the cavities remain spaced from the release agent to produce an intermediate structure; the release agent disposed on the top surface of the wafer and with the bottom portions of the cavities void of the release agent; exposing the intermediate structure to the material to blanket coat the material on both the release agent and the bottom portions of the cavities; and selectively removing the release agent together with the coating material while leaving the coating material on the bottom portions of the cavities.
Opening claim text (preview).
What is claimed is: 1. A method for forming a coating of a material on selected portions of a substrate having a plurality of cavities formed in selected portions of a surface of the substrate, each cavity having outer, peripheral sidewalls extending outwardly from the cavity floor, comprising: providing a structure having a release agent thereon; contacting a top surface of the substrate with the release agent to transfer portions of the release agent to the top surface of the…
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