Method for manufacturing a field effect transistor of a non-planar type

Patent metadata

Field	Value
Publication number	US-9105746-B2
Application number	US-201414521083-A
Country	US
Kind code	B2
Filing date	Oct 22, 2014
Priority date	Oct 22, 2013
Publication date	Aug 11, 2015
Grant date	Aug 11, 2015

Abstract

A method for manufacturing a field effect transistor of a non-planar type, comprising providing a substrate having an initially planar front main surface, and providing shallow trench isolation structures in the substrate on the front surface, thereby defining a plurality of fin structures in the substrate between the shallow trench isolation structures. Top surfaces of the shallow trench isolation structures and the fin structures abut on a common planar surface, and sidewalls of the fin structures are fully concealed by the shallow trench isolation structures. The method also includes forming a dummy gate structure over a central portion of the plurality of fin structures on the common planar surface, forming dielectric spacer structures around the dummy gate structure, and removing the dummy gate structure, thereby leaving a gate trench defined by the dielectric spacer structures. Further, the method includes removing an upper portion of at least two shallow trench isolation structures to expose at least a portion of the sidewalls of the fin structures within the gate trench, and forming a final gate stack in the gate trench.

First claim

What is claimed is:

1. A method for manufacturing a field effect transistor of a non-planar type, comprising:
providing a substrate having an initially planar front main surface;
providing shallow trench isolation structures in the substrate on the front surface, thereby defining a plurality of fin structures in the substrate between the shallow trench isolation structures, wherein top surfaces of the shallow trench isolation structures and the fin structures are abutting on a c…

Assignees

• Imec Vzw

Inventors

• Kim Min-Soo
• Boccardi Guillaume
• Chew Soon Aik
• Horiguchi Naoto

Classifications

• H10P14/6922

  Electricity · mapped topic

• H10W10/0121

  Electricity · mapped topic

• H10W10/13

  Electricity · mapped topic

• H10D84/0188

  Electricity · mapped topic

• H10D84/0179

  Electricity · mapped topic