Substrate treating apparatus and substrate treating method
US-2024030057-A1 · Jan 25, 2024 · US
Magnetic tunnel junction structure
US9105670B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9105670-B2 |
| Application number | US-201314023899-A |
| Country | US |
| Kind code | B2 |
| Filing date | Sep 11, 2013 |
| Priority date | Mar 4, 2008 |
| Publication date | Aug 11, 2015 |
| Grant date | Aug 11, 2015 |
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Abstract
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A method comprises forming a trench in a substrate. The method also comprises depositing a magnetic tunnel junction (MTJ) structure within the trench. The method further comprises planarizing the MTJ.
First claim
Opening claim text (preview).
What is claimed is: 1. A method of forming a magnetic tunnel junction device, the method comprising: forming a trench in a substrate, that comprises an inter-metal dielectric layer and a cap film layer; depositing a magnetic tunnel junction (MTJ) structure within the trench; and planarizing the MTJ structure without performing a photo-etching process on the MTJ structure. 2. The method of claim 1 , wherein planarizing the MTJ structure comprises planariz…
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- H10P72/04Primary
Electricity · mapped topic
Electricity · mapped topic
Electricity · mapped topic
Physics · mapped topic
Physics · mapped topic
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Frequently asked questions
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- What does patent US9105670B2 cover?
- A method comprises forming a trench in a substrate. The method also comprises depositing a magnetic tunnel junction (MTJ) structure within the trench. The method further comprises planarizing the MTJ.
- Who is the assignee on this patent?
- Qualcomm Inc
- What technology area does this patent fall under?
- Primary CPC classification H10P72/04. Mapped technology areas include Electricity.
- When was this patent published?
- Publication date Tue Aug 11 2015 00:00:00 GMT+0000 (Coordinated Universal Time) (B2). Legal status and post-grant events are not shown on this page.
- What related patents are in patentsdb?
- We list 8 related publications on this page (citations in our corpus or others sharing the same primary CPC).