Metal gates for semiconductor devices and method thereof
US-2024429281-A1 · Dec 26, 2024 · US
US9105609B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9105609-B2 |
| Application number | US-91229610-A |
| Country | US |
| Kind code | B2 |
| Filing date | Oct 26, 2010 |
| Priority date | Oct 30, 2009 |
| Publication date | Aug 11, 2015 |
| Grant date | Aug 11, 2015 |
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A non-linear element (e.g., a diode) with small reverse saturation current is provided. A non-linear element includes a first electrode provided over a substrate, an oxide semiconductor film provided on and in contact with the first electrode, a second electrode provided on and in contact with the oxide semiconductor film, a gate insulating film covering the first electrode, the oxide semiconductor film, and the second electrode, and a third electrode provided in contact with the gate insulating film and adjacent to a side surface of the oxide semiconductor film with the gate insulating film interposed therebetween or a third electrode provided in contact with the gate insulating film and surrounding the second electrode. The third electrode is connected to the first electrode or the second electrode.
Opening claim text (preview).
The invention claimed is: 1. A non-linear element comprising: a first electrode over a substrate; an oxide semiconductor film on and in contact with the first electrode; a second electrode on and in contact with the oxide semiconductor film; a gate insulating film covering the first electrode, the oxide semiconductor film, and the second electrode; a plurality of third electrodes adjacent to the oxide semiconductor film with the gate insulating film interposed therebetween…
Electricity · mapped topic
Electricity · mapped topic
Electricity · mapped topic
Electricity · mapped topic
Electricity · mapped topic
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